Ibyuma bya Organic Chemical Deposition

Ibyuma biva mu bimera biva mu bimera (MOCVD), isoko y’ibintu bya gaze ni gaze ya gaze ya gaze, kandi uburyo bwibanze bwo gufata ibintu bisa na CVD.

1.MOCVD gaze mbisi

Inkomoko ya gaze ikoreshwa kuri MOCVD ni gaze ya organic-organic compound (MOC). Ibyuma-ngengabuzima ni ibintu bihamye byakozwe muguhuza ibintu kama nicyuma. Ibinyabuzima kama bifite alkyl, aromatic. Alkyl irimo methyl, ethyl, propyl, na butyl. Alkyl irimo methyl, ethyl, propyl, na butyl. Aromatic harimo na fenyl homologues, trimethyl gallium, [Ga (CH₃)₃], trimethyl aluminium [Al (CH₃)₃] kubitsa mikorobe, optoelectronics, semiconductor muri bitatu, bitanu mubice bya firime, nka Ga (CH₃)₃ na ammonia irashobora kuba muri silicon wafer cyangwa safiro kumikurire ya epitaxial yamatara ya LED murwego rwa InGaN luminescent. Amatara ya LED arenze tungsten incandescent izigama ingufu 90%, amatara arenga 60% azigama ingufu za fluorescent. Amatara ya LED akoresha ingufu za 90% kurusha amatara ya tungsten yaka kandi 60% akoresha ingufu kurusha amatara ya fluorescent. Muri iki gihe, amatara yose yo kumuhanda, amatara yamatara namatara yimodoka ahanini akoresha firime ya LED itanga urumuri rwakozwe na MOCVD.

2. Ubushyuhe bwo kubitsa

Ubushyuhe bwangirika bwibintu kama kama ni buke, kandi ubushyuhe bwo kubitsa buri munsi yubwa HCVD. Ubushyuhe bwa TiN bwashyizwe na MOCVD burashobora kugabanuka kugera kuri dogere 500.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua