Umuyoboro ushyushye arc wongereye plasma ya chimique ya vapor de tekinoroji ikoresha imbunda ishyushye ya arc imbunda yohereza arc plasma, mu magambo ahinnye nkicyuma gishyushye arc tekinoroji ya PECVD. Iri koranabuhanga risa n’ikoranabuhanga rishyushye arc imbunda ya ion yo gutwikira, ariko itandukaniro ni uko firime ikomeye yabonywe na wire wire arc imbunda ya ion itwikiriye ikoresha arc yumucyo wa elegitoronike ya elegitoronike itangwa nimbunda ishyushye ya arc kugirango ishyushye kandi ihumure ibyuma mubyingenzi, mugihe urumuri rushyushye arc urumuri PECVD rugaburirwa imyuka ya reaction, nka CH4 na H2, zikoreshwa mukubika firime ya diyama. Mu kwishingikiriza kumuyoboro mwinshi wa arc usohoka utangwa nimbunda ishyushye ya arc imbunda, ion ya gaze ya reaction ishimishwa no kubona ibice bitandukanye bikora, harimo ion ya gaze, ion atomike, amatsinda akora, nibindi.
Mu cyuma gishyushye arc PECVD, ibyuma bibiri bya electromagnetic biracyashyirwa hanze yicyumba cyo gutwikamo, bigatuma umuvuduko wa elegitoronike mwinshi uzunguruka mugihe ugenda werekeza kuri anode, bikongerera amahirwe yo kugongana na ionisation hagati ya electron na gaze ya reaction. Igiceri cya electromagnetic kirashobora kandi guhurira mumurongo wa arc kugirango wongere plasma yubucucike bwicyumba cyose cyabitswe. Muri plasma plasma, ubwinshi bwibi bice bikora ni byinshi, byoroshye kubitsa firime ya diyama nibindi bice bya firime kumurimo.
——Iyi ngingo yasohowe na tekinoroji ya Guangdong Zhenhua, auruganda rukora imashini nziza.
Igihe cyo kohereza: Gicurasi-05-2023