(1) Gusohora gaze. Gazi isohoka igomba kuba ifite ibiranga umusaruro mwinshi mwinshi, inert kubintu bigenewe, bihendutse, byoroshye kubona ubuziranenge bwinshi nibindi biranga. Muri rusange, argon nicyiza cyiza cya gaz.
(2) Gusohora voltage na substrate voltage. Ibi bipimo byombi bigira ingaruka zikomeye kubiranga firime, gusohora voltage ntibigira ingaruka gusa ku kigero cyo kubitsa, ahubwo binagira ingaruka zikomeye kumiterere ya firime yabitswe. Substrate ishobora kugira ingaruka itaziguye ya electron cyangwa ion yo guterwa abantu. Niba substrate ihagaze, iterwa na electron zingana; niba substrate ihagaritswe, ni mumwanya wo gusohora urumuri kugirango ubone ubushobozi bubi ugereranije nubutaka bushobora guhagarikwa V1, hamwe nubushobozi bwa plasma ikikije substrate V2 kuba hejuru yubushobozi bwa substrate, ibyo bikazabyara urwego runaka rwibisasu bya electroni na ion nziza, bikavamo impinduka mubyerekeranye na firime ya elegitoronike, hamwe nibindi biranga: niba insimburangingo ikorwa muburyo bwa electro, ion, ntabwo ishobora kweza substrate gusa no kongera ifatizo rya firime, ariko kandi ihindura imiterere ya firime. Mu maradiyo yumurongo wa radiyo, gutegura imiyoboro ya kanda hiyongereyeho DC kubogama: gutegura dielectric membrane hiyongereyeho kubogama.
(3) Kwerekana ubushyuhe. Ubushyuhe bwa Substrate bugira uruhare runini kubibazo byimbere muri firime, biterwa nubushyuhe bugira ingaruka zitaziguye kumikorere ya atome zabitswe kuri substrate, bityo bikagena imiterere ya firime, imiterere, ingano yingano, icyerekezo cya kirisiti hamwe no kutuzura.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Mutarama-05-2024