Kugwiritsa ntchito RF kutulutsa

1.Kuthandiza kwa sputtering ndi plating kutchinjiriza filimu. Kusintha kwachangu kwa electrode polarity kungagwiritsidwe ntchito kuthamangitsa mipherezero mwachindunji kuti mupeze mafilimu oteteza. Ngati gwero lamagetsi la DC likugwiritsidwa ntchito kutulutsa ndi kuyika filimu yotsekera, filimu yotsekerayo imatsekereza ma ion kuti asalowe mu cathode, ndikupanga wosanjikiza wabwino wa ion, womwe umakonda kusweka ndi kuyaka. Pambuyo poyika filimu yotchinga pa anode, ma elekitironi amatsekedwa kuti asalowe mu anode, zomwe zimapangitsa kuti anode azisowa. Mukamagwiritsa ntchito gwero lamagetsi la RF kuti muveke filimu yotchinjiriza, chifukwa cha kusintha kwa ma elekitirodi, zolipiritsa zomwe zimasonkhanitsidwa pa cathode mu theka loyamba la kuzungulirako sizingathetsedwe ndi ma elekitironi mu theka lachiwiri la kuzungulira, ndipo ma elekitironi osonkhanitsidwa pa anode adzachotsedwa ndi ma ion abwino. Njira yotsutsana ndi gawo lachiwiri lachiwiri imatha kuthetsa kuchulukira kwa ndalama pa electrode, ndipo njira yotulutsira imatha kupitilira bwino.

2.Ma elekitirodi apamwamba kwambiri amadzipangira kudzikonda. Mu chipangizo cha RF chokhala ndi ma elekitirodi athyathyathya, ma elekitirodi othamanga kwambiri pozungulira pogwiritsa ntchito capacitive coupling mafananidwe amadzipangira voteji. Kusiyana kwakukulu pakati pa liwiro la kusamuka kwa ma elekitironi ndi liwiro la kusamuka kwa ion pakutha kumathandizira kuti ma elekitironi akwaniritse liwiro lalikulu pa nthawi yoperekedwa, pomwe kuthamanga kwa ion pang'onopang'ono kumayambitsa kudzikundikira. Ma elekitirodi othamanga kwambiri amakhala pamlingo woyipa kwambiri pamzere uliwonse, zomwe zimapangitsa kuti pakhale voteji yoyipa pamtunda, chomwe ndi chodabwitsa chodzipangira yekha ma elekitirodi apamwamba kwambiri.

Kudzikonda komwe kumapangidwa ndi RF discharge electrode kumafulumizitsa kuphulika kwa ma ion a electrode ya cathode kuti atulutse ma elekitironi a Sekondale mosalekeza kuti apitilize kutulutsa, ndipo kudzikonda kumachitanso chimodzimodzi ndi kutsika kwa cathode pakutulutsa kwa DC. Ngakhale kugwiritsa ntchito magetsi a RF, kutulutsako kumatha kukhala kokhazikika chifukwa chamagetsi odzipangira okha omwe amapangidwa ndi ma elekitirodi apamwamba kwambiri omwe amafika 500-1000V.

3. Kutulutsa pafupipafupi kwawayilesi kumagwira ntchito yofunika kwambiri pakutulutsa kwamphamvu kwapamlengalenga komanso kutulutsa kotchinga kwa dielectric chotchinga komwe kumayambitsa pambuyo pake.