Metal organic chemical vapor deposition (MOCVD), gwero la zinthu za gaseous ndi chitsulo cha organic pawiri gasi, ndipo zomwe zimayambira zimafanana ndi CVD.
1.MOCVD mpweya waiwisi
Gwero la mpweya lomwe limagwiritsidwa ntchito ku MOCVD ndi gasi wa metal-organic compound (MOC). Zitsulo-organic mankhwala ndi khola mankhwala opangidwa ndi kuphatikiza organic zinthu ndi zitsulo. Ma organic compounds ali ndi alkyl, onunkhira. Alkyl ikuphatikizapo methyl, ethyl, propyl, ndi butyl. Alkyl ikuphatikizapo methyl, ethyl, propyl, ndi butyl. Zonunkhira kuphatikiza phenyl homologues, trimethyl gallium, [Ga(CH3)3], trimethyl aluminium [Al(CH3)3] pakuyika kwa ma microelectronics, optoelectronics, semiconductors muzinthu zitatu, zisanu pagawo la filimuyo, monga Ga(CH)3)3 ndi ammonia akhoza kukhala mu silicon chowotcha kapena safiro pa kukula epitaxial nyali LED mu InGaN luminescent wosanjikiza. Nyali za LED ndizoposa tungsten incandescent zopulumutsa mphamvu 90%, kuposa 60% yopulumutsa mphamvu ya fulorosenti. Nyali za LED ndi 90% zowonjezera mphamvu kuposa nyali za tungsten incandescent ndi 60% zowonjezera mphamvu kuposa nyali za fulorosenti. Masiku ano, mitundu yonse ya nyali zam'misewu, nyali zowunikira ndi nyali zamagalimoto zimagwiritsa ntchito mafilimu otulutsa kuwala kwa LED opangidwa ndi MOCVD.
2. Kutentha kwa malo
Kutentha kwapang'onopang'ono kwa organic metal compounds ndi kochepa, ndipo kutentha kwapangidwe kumakhala kochepa kuposa kwa HCVD. Kutentha kwa TiN komwe kumayikidwa ndi MOCVD kumatha kuchepetsedwa mpaka madigiri 500.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Oct-20-2023