Ukadaulo wa waya wotentha wopititsa patsogolo ukadaulo wa plasma chemical vapor deposition umagwiritsa ntchito mfuti yotentha ya arc kutulutsa arc plasma, yofupikitsidwa ngati ukadaulo wotentha wa waya arc PECVD. luso limeneli ndi ofanana ndi otentha waya arc mfuti ❖ kuyanika luso ❖ kuyanika, koma kusiyana ndi kuti filimu olimba akapeza otentha waya arc mfuti ❖ kuyanika ❖ kuyanika amagwiritsa arc kuwala elekitironi otaya zimatuluka ndi otentha waya arc mfuti kutentha ndi nthunzi zitsulo mu crucible, pamene otentha waya arc kuwala PECVD amadyetsedwa monga gawo 2CH filimu ndi madontho a diamondi filimu. Podalira kutulutsa kwamphamvu kwa arc komwe kumatulutsidwa ndi mfuti yotentha ya waya ya arc, ma ion a gasi othamanga amasangalala kupeza tinthu tating'ono tating'ono, kuphatikiza ma ion a gasi, ayoni a atomiki, magulu ogwira ntchito, ndi zina zotero.
Mu chipangizo chotentha cha arc PECVD, ma coil awiri a electromagnetic amaikidwabe kunja kwa chipinda chophikira, kuchititsa kuti ma elekitironi othamanga kwambiri azitha kuzungulira panthawi yopita ku anode, kuonjezera mwayi wa kugunda ndi ionization pakati pa kutuluka kwa electron ndi gasi. Koyilo yamagetsi imathanso kusinthika kukhala gawo la arc kuti iwonjezere kuchuluka kwa plasma m'chipinda chonse choyikamo. Mu arc plasma, kachulukidwe ka tinthu ting'onoting'ono tating'ono tating'onoting'ono, zomwe zimapangitsa kuti zikhale zosavuta kuyika mafilimu a diamondi ndi zigawo zina zamakanema pa workpiece.
——Nkhaniyi yatulutsidwa ndi Guangdong Zhenhua Technology, awopanga makina opaka utoto.
Nthawi yotumiza: May-05-2023