1.Beneficial maka sputtering na plating mkpuchi ihe nkiri. Enwere ike iji mgbanwe ngwa ngwa na polarity electrode mee ka ebumnobi na-ekpu ihe iji nweta ihe nkiri mkpuchi. Ọ bụrụ na a na-eji isi iyi DC na-agbapụta ma tinye ihe nkiri mkpuchi mkpuchi, ihe nkiri mkpuchi ahụ ga-egbochi ion dị mma ịbanye na cathode, na-emepụta akwa akwa akwa ion dị mma, nke na-adịkarị mfe imebi na ịgbanye ọkụ. Mgbe etinyere ihe nkiri mkpuchi na anode, a na-egbochi electrons ịbanye na anode, na-ebute ihe ngosi nke anode. Mgbe ị na-eji isi iyi ike RF kpuchie ihe nkiri mkpuchi mkpuchi, n'ihi polarity ọzọ nke electrodes, ụgwọ dị mma agbakọbara na cathode na ọkara mbụ nke okirikiri ga-ewepụ ya site na electrons na ọkara nke abụọ nke okirikiri, na electrons gbakọtara na anode ga-ewepụ ya site na ion dị mma. Usoro nke ọzọ na nkera nke abụọ okirikiri nwere ike iwepụ mkpokọta nke ụgwọ na electrode, na mwepụ usoro nwere ike ịga n'ihu na-emekarị.
2.High ugboro electrodes na-emepụta mkparị onwe onye. N'ime ngwaọrụ RF nke nwere usoro electrode dị larịị, electrodes na-adị elu na sekit na-eji njikọta capacitive na-emepụta voltaji nke onwe. Nnukwu ihe dị iche n'etiti ọsọ nfegharị eletrọn na ion ion na-agba ọsọ na mwepụ na-enyere ndị electrons aka iru ọsọ ọsọ ka ukwuu n'otu oge, ebe ion na-agba ọsọ na-eme ka nchịkọta. Igwe eletrọd dị elu na-enwe mmetụta na-adịghị mma maka ọtụtụ n'ime okirikiri nke ọ bụla, na-ebute voltaji na-adịghị mma na mbara ala, nke bụ ihe na-eme n'onwe ya nke electrode dị elu.
Ọhụụ onwe onye nke RF na-ewepụta electrode na-eme ka ion bombu nke cathode electrode na-aga n'ihu na-ebunye electrons nke abụọ iji nọgide na-enwe usoro mwepụ ahụ, na mkparị onwe onye na-arụ ọrụ yiri nke ahụ na nkwụsị nke cathode na nkwụsị ọkụ DC. N'agbanyeghị na iji ọkụ RF, mwepu ahụ nwere ike kwụsie ike n'ihi voltaji na-eleda onwe ya anya nke electrode dị elu na-erute 500-1000V.
3. Mwepu ugboro redio na-arụ ọrụ dị mkpa na ikuku ikuku na-egbuke egbuke na ihe mgbochi dielectric na-egbuke egbuke ewepụtara ma emechaa.
Oge nzipu: Jun-21-2023