Metal organic chemical vapor deposition (MOCVD), isi iyi nke gaseous ihe bụ metal organic compound gas, na isi mmeghachi omume mmeghachi omume nke nkwụnye ego yiri CVD.
1.MOCVD raw gas
Isi iyi gaseous eji maka MOCVD bụ igwe-organic compound (MOC) gas. Ngwakọta metal-organic bụ ogige kwụsiri ike nke a na-emepụta site na ijikọta ihe ndị dị ndụ na ọla. Organic ogige nwere alkyl, aromatic. Alkyl gụnyere methyl, ethyl, propyl, na butyl. Alkyl gụnyere methyl, ethyl, propyl, na butyl. Ihe na-esi ísì ụtọ gụnyere phenyl homologues, trimethyl gallium, [Ga (CH3)3], trimethyl aluminum [Al(CH3)3] maka ntinye nke microelectronics, optoelectronics, semiconductors na atọ, ogige ise na oyi akwa ihe nkiri, dị ka Ga (CH)3)3 na amonia nwere ike ịbụ na silicon wafer ma ọ bụ sapphire na epitaxial uto nke LED oriọna na InGaN luminescent oyi akwa. oriọna LED karịrị tungsten incandescent ike na-azọpụta ike 90%, karịa 60% oriọna na-azọpụta ike. Ọkụ ọkụ LED dị 90% ike karịa ọkụ ọkụ tungsten na 60% ike karịa oriọna fluorescent. N'oge a, ụdị oriọna ọ bụla, oriọna ọkụ na oriọna ụgbọ ala na-eji ihe nkiri ọkụ ọkụ LED nke MOCVD mepụtara.
2. Deposition okpomọkụ
Okpomọkụ ire ere nke ogige metal organic dị ala, na ọnọdụ nkwụnye ego dị ala karịa nke HCVD. Enwere ike ibelata okpomọkụ nke TiN nke MOCVD debere ruo ihe dịka ogo 500.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Ọktoba 20-2023