1.Beneficial rau sputtering thiab plating rwb thaiv tsev zaj duab xis. Kev hloov pauv sai ntawm electrode polarity tuaj yeem siv los ncaj qha sputter insulating lub hom phiaj kom tau txais cov yeeb yaj kiab insulating. Yog tias DC lub zog siv hluav taws xob tau siv los ua cov khoom siv hluav taws xob thiab cov yeeb yaj kiab pov tseg, cov yeeb yaj kiab rwb thaiv tsev yuav thaiv cov ions zoo los ntawm kev nkag mus rau hauv cathode, tsim cov txheej txheem zoo ion accumulation, uas yog qhov ua rau tawg thiab tawg. Tom qab tso ib zaj duab xis insulating ntawm lub anode, cov electrons raug thaiv los ntawm kev nkag mus rau hauv anode, uas ua rau qhov tshwm sim ntawm anode ploj. Thaum siv lub zog RF los ua cov txheej txheem rwb thaiv tsev zaj duab xis, vim qhov hloov pauv ntawm polarity ntawm cov electrodes, cov nqi zoo hauv cathode nyob rau hauv thawj ib nrab ntawm lub voj voog yuav neutralized los ntawm electrons nyob rau hauv lub thib ob ib nrab ntawm lub voj voog, thiab cov electrons nyob rau hauv lub anode yuav neutralized los ntawm zoo ions. Cov txheej txheem rov qab nyob rau hauv lub voj voog thib ob tuaj yeem tshem tawm cov tsub zuj zuj ntawm cov electrode, thiab cov txheej txheem tawm tuaj yeem ua haujlwm li qub.
2.High zaus electrodes tsim tus kheej bias. Nyob rau hauv lub RF ntaus ntawv nrog ib tug ca electrode qauv, lub high-zaus electrodes nyob rau hauv lub Circuit Court siv capacitive coupling txuam ua rau nws tus kheej bias voltage. Qhov sib txawv loj ntawm electron migration speed thiab ion migration speed in discharge enables electrons to achieve a greater movement speed of a given time, while the slower ion speed makes accumululation. Lub high-frequency electrode yog nyob rau ntawm ib tug tsis zoo lub peev xwm rau feem ntau ntawm txhua lub voj voog, uas ua rau ib tug tsis zoo voltage nyob rau hauv lub struts, uas yog lub phenomenon ntawm tus kheej bias ntawm high-frequency electrode.
Tus kheej bias generated los ntawm RF tawm electrode accelerates lub ion bombardment ntawm lub cathode electrode tsis tu ncua emit Secondary electrons los tswj cov txheej txheem paug, thiab tus kheej bias plays ib tug zoo xws li lub luag hauj lwm rau lub cathode poob nyob rau hauv DC glow paug. Txawm hais tias siv lub zog hluav taws xob RF, qhov tso tawm tuaj yeem ruaj khov vim nws tus kheej tsis ncaj ncees voltage generated los ntawm high-frequency electrode ncav cuag 500-1000V.
3. Xov tooj cua zaus tso tawm plays lub luag haujlwm tseem ceeb hauv atmospheric siab glow tawm thiab dielectric barrier glow tawm qhia tom qab.
Post lub sij hawm: Jun-21-2023