Hlau organic chemical vapor deposition (MOCVD), lub hauv paus ntawm gaseous khoom yog hlau organic compound gas, thiab cov txheej txheem cov tshuaj tiv thaiv ntawm deposition zoo ib yam li CVD.
1.MOCVD raw gas
Lub gaseous qhov chaw siv rau MOCVD yog hlau-organic compound (MOC) roj. Hlau-organic tebchaw yog cov sib txuas ruaj khov uas tsim los ntawm kev sib txuas cov organic nrog cov hlau. Organic compounds muaj alkyl, aromatic. Alkyl muaj xws li methyl, ethyl, propyl, thiab butyl. Alkyl muaj xws li methyl, ethyl, propyl, thiab butyl. Aromatic suav nrog phenyl homologues, trimethyl gallium, [Ga(CH3)3], trimethyl aluminium [Al(CH3)3] rau deposition ntawm microelectronics, optoelectronics, semiconductors nyob rau hauv peb, tsib compounds nyob rau hauv zaj duab xis txheej, xws li Ga(CH3)3 thiab ammonia tuaj yeem nyob rau hauv silicon wafer lossis sapphire ntawm epitaxial kev loj hlob ntawm LED teeb nyob rau hauv InGaN luminescent txheej. LED teeb muaj ntau tshaj li tungsten incandescent zog-txuag 90%, ntau tshaj 60% lub zog-txuag fluorescent teeb. LED teeb yog 90% ntau zog npaum li tungsten incandescent teeb thiab 60% ntau zog npaum li fluorescent teeb. Niaj hnub no, txhua yam ntawm txoj kev teeb pom kev zoo, teeb pom kev zoo thiab lub tsheb teeb pib siv LED teeb pom kev zoo uas tsim los ntawm MOCVD.
2. Deposition kub
Lub decomposition kub ntawm cov organic hlau tebchaw yog tsawg, thiab cov deposition kub yog qis dua li ntawm HCVD. Qhov ntsuas kub ntawm TiN tso los ntawm MOCVD tuaj yeem raug txo kom txog li 500 degree.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Oct-20-2023