(1) Sputtering gas. Cov roj sputtering yuav tsum muaj cov yam ntxwv ntawm high sputtering tawm los, inert rau lub hom phiaj cov khoom, pheej yig, yooj yim kom tau siab purity thiab lwm yam ntxwv. Feem ntau hais lus, argon yog qhov zoo tshaj plaws sputtering roj.
(2) Sputtering voltage thiab substrate voltage. Ob qhov kev txwv no muaj kev cuam tshuam tseem ceeb rau cov yam ntxwv ntawm cov yeeb yaj kiab, sputtering voltage tsis tsuas yog cuam tshuam rau tus nqi deposition, tab sis kuj tseem cuam tshuam rau cov qauv ntawm cov yeeb yaj kiab tso tawm. Substrate muaj peev xwm cuam tshuam ncaj qha rau electron lossis ion ntws ntawm tib neeg kev txhaj tshuaj. Yog hais tias lub substrate yog grounded, nws yog bombarded los ntawm sib npaug electrons; Yog hais tias lub substrate raug tshem tawm, nws yog nyob rau hauv lub glow discharge cheeb tsam kom tau ib tug me ntsis tsis zoo tej zaum txheeb ze rau hauv av ntawm lub ncua kev kawm ntawv muaj peev xwm V1, thiab lub peev xwm ntawm lub plasma nyob ib ncig ntawm lub substrate V2 yuav tsum siab tshaj lub substrate muaj peev xwm, uas yuav ua rau ib tug tej yam degree ntawm bombardment ntawm electrons thiab zoo ions, uas ua rau muaj kev hloov nyob rau hauv lwm yam substrate cov yam ntxwv, yog li ntawd voltage, muaj pes tsawg leeg. nws yog nyob rau hauv raws li lub polarity ntawm cov hluav taws xob txais ntawm electrons los yog ions, tsis tsuas yog yuav purify lub substrate thiab txhim khu lub adhesion ntawm zaj duab xis, tab sis kuj hloov cov qauv ntawm cov zaj duab xis. Nyob rau hauv lub xov tooj cua zaus sputtering txheej, kev npaj ntawm tus neeg xyuas pib membrane ntxiv rau DC bias: kev npaj ntawm dielectric membrane ntxiv rau tuning bias.
(3) Substrate kub. Substrate kub muaj qhov cuam tshuam ntau dua rau kev ntxhov siab sab hauv ntawm zaj duab xis, uas yog vim qhov kub thiab txias cuam tshuam ncaj qha rau kev ua haujlwm ntawm cov atoms tso rau ntawm lub substrate, yog li txiav txim siab cov ntsiab lus ntawm cov zaj duab xis, cov qauv, qhov nruab nrab ntawm cov nplej loj, siv lead ua orientation thiab incompleteness.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Jan-05-2024