ʻO ka hoʻoheheʻe ʻia ʻana o ke kinoea kinoea metala (MOCVD), ʻo ke kumu o nā mea kinoea he metala kinoea hoʻohuihui metala, a ʻo ke kaʻina hana kumu o ka deposition ua like ia me CVD.
1.MOCVD kinoea maka
ʻO ke kumu kinoea i hoʻohana ʻia no MOCVD ʻo ia ke kinoea metala-organic compound (MOC). ʻO nā pūhui metala-organic nā pūhui paʻa i hana ʻia e ka hui ʻana i nā mea ola me nā metala. Loaʻa i nā pūhui organik he alkyl, aromatic. ʻO Alkyl ka methyl, ethyl, propyl, a me ka butyl. ʻO Alkyl ka methyl, ethyl, propyl, a me ka butyl. Aromatic me nā phenyl homologues, trimethyl gallium, [Ga(CH3)3], alumini trimethyl [Al(CH3)3] no ka waiho ʻana o nā microelectronics, optoelectronics, semiconductor i loko o nā pūhui ʻekolu, ʻelima i ka papa kiʻiʻoniʻoni, e like me Ga(CH3)3 a hiki i ka amonia i loko o ka wafer silicon a i ʻole sapphire ma ka ulu epitaxial o nā kukui LED ma ka papa luminescent InGaN. ʻOi aku ka nui o nā kukui LED ma mua o ka tungsten incandescent e mālama i ka ikehu 90%, ʻoi aku ma mua o 60% mau kukui hoʻōla ʻana i ka ikehu. ʻO nā kukui LED he 90% ʻoi aku ka ikaika ma mua o nā kukui tungsten incandescent a me 60% ʻoi aku ka ikaika ma mua o nā kukui fluorescent. I kēia mau lā, hoʻohana nā ʻano kukui alanui āpau, nā kukui kukui a me nā kukui kaʻa i nā kiʻi ʻoniʻoni kukui LED i hana ʻia e MOCVD.
2. Ka wela o ka waiho ʻana
He haʻahaʻa ka mahana decomposition o nā pūhui metala organik, a ʻoi aku ka haʻahaʻa o ka mahana deposition ma mua o ka HCVD. Hiki ke hoʻemi ʻia ka mahana deposition o TiN i waiho ʻia e MOCVD ma kahi o 500 degere.
-Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini hoʻopaʻa haʻahaʻaGuangdong Zhenhua
Ka manawa hoʻouna: Oct-20-2023