Metal Organic chemical tururi jijiya (MOCVD), tushen gaseous abu ne karfe Organic fili fili tsarin, da kuma asali dauki tsari na ajiya yayi kama da CVD.
1.MOCVD danyen gas
Tushen gas ɗin da ake amfani da shi don MOCVD gas ne na ƙarfe-kwayoyin halitta (MOC). Ƙarfe-organic mahadi su ne barga mahadi samar ta hanyar hada kwayoyin abubuwa da karafa. Kwayoyin halitta suna da alkyl, aromatic. Alkyl ya hada da methyl, ethyl, propyl, da butyl. Alkyl ya hada da methyl, ethyl, propyl, da butyl. Aromatik ciki har da phenyl homologues, trimethyl gallium, [Ga(CH3)3trimethyl aluminum [Al(CH3)3] don ƙaddamar da microelectronics, optoelectronics, semiconductor a cikin uku, biyar mahadi a cikin fim din Layer, kamar Ga (CH)3)3 kuma ammonia na iya kasancewa a cikin wafer siliki ko sapphire akan haɓakar epitaxial na fitilun LED a cikin Layer luminescent InGaN. Fitilolin LED sun fi tungsten incandescent makamashi-ceton 90%, fiye da 60% fitulun mai ceton makamashi. Fitilolin LED sun fi ƙarfin 90% fiye da fitilun tungsten da kuma 60% mafi ƙarfi fiye da fitilu masu kyalli. A zamanin yau, kowane nau'in fitulun titi, fitilun fitilu da fitilun mota suna amfani da fina-finai masu ba da haske na LED wanda MOCVD ke samarwa.
2. Deposition zafin jiki
Yanayin bazuwar mahaɗan ƙarfe na kwayoyin halitta ba su da ƙasa, kuma yawan zafin jiki ya yi ƙasa da na HCVD. Za a iya rage yawan zafin jiki na TiN da MOCVD ke ajiyewa zuwa kusan digiri 500.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Oktoba-20-2023