Umshini wokumboza nge-vacuum ohlelweni lokupompa unezidingo ezilandelayo eziyisisekelo:
(1) Uhlelo lwe-vacuum lokumboza kufanele lube nesilinganiso sokumpompa esikhulu ngokwanele, okungafanele nje kuphela lupompe ngokushesha amagesi akhishwe ku-substrate nezinto ezihwamukile kanye nezingxenye ezisegumbini le-vacuum ngesikhathi senqubo yokumboza, kodwa futhi lukwazi ukupompa ngokushesha amagesi akhishwe enkambisweni yokumboza nokumboza ama-ion, kanye nokuvuza kwegesi kwenqubo yokumboza nokumboza ama-ion kanye nohlelo.
Ukuvuza kwegesi ngesikhathi sokukhafula kanye nenqubo yokumboza ama-ion nakho kungakhishwa ngokushesha. Ukuze kuthuthukiswe umkhiqizo womshini wokumboza, kufanele ukwazi ukusebenza ngokushesha.
(2) I-vacuum yokugcina yomshini wokupompa kufanele ihluke ngokwezidingo zamafilimu ahlukene. Ithebula 7-9 liwububanzi bezinga le-vacuum elidingekayo yinqubo yokumboza amafilimu ahlukene.
(3) Ku-oyela diffusion pump njengoba uhlelo oluyinhloko lokupompa ludinga, izinga lokubuyisa uwoyela ku-oyela ku-oyela lincane ngangokunokwenzeka, ngoba umusi kawoyela obuyayo uzongcolisa ubuso be-workpiece futhi ubangele ikhwalithi yefilimu yehle. Ku-oyela diffusion pump ...
(4) Izinga lokuvuza kwegumbi lokumboza i-vacuum kanye nesistimu yalo yokupompa kufanele libe lincane, okungukuthi, noma ngabe kungukuvuza kwegesi engabonakali, kuzothinta ikhwalithi yefilimu. Ngakho-ke, ukuze kuqinisekiswe ukusebenza kokuvala kwesistimu, izinga lokuvuza eliphelele lesistimu kumele lilinganiselwe ebangeni elivunyelwe.
(5) Ukusebenza, ukusetshenziswa kanye nokugcinwa kohlelo lwe-vacuum kufanele kube lula, kuzinzile futhi kube nokusebenza okuthembekile.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Disemba 14-2023