Umatshini wokugquma nge-vacuum kwinkqubo yokumpompa unezi mfuno zilandelayo ezisisiseko:
(1) Inkqubo yokufunxa i-vacuum yokugquma kufuneka ibe nesantya sokufunxa esikhulu ngokwaneleyo, esingafanele sikhuphe ngokukhawuleza iigesi ezikhutshwa kwi-substrate kunye nezinto eziphumayo kunye nezinto ezikwigumbi lokufunxa ngexesha lenkqubo yokufunxa, kodwa sikwazi nokufunxa ngokukhawuleza iigesi ezikhutshwa kwinkqubo yokufunxa i-sputtering kunye ne-ion coating, kunye nokuvuza kwegesi kwenkqubo yokufunxa i-sputtering kunye ne-ion coating kunye nenkqubo.
Ukuvuza kwegesi ngexesha lokutshiza kunye nenkqubo yokugquma i-ion nako kunokukhutshwa ngokukhawuleza. Ukuze kuphuculwe imveliso yomatshini wokugquma, kufuneka ukwazi ukusebenza ngokukhawuleza.
(2) I-vacuum yokugqibela yenkqubo yokupompa umatshini wokugquma kufuneka yahluke ngokweemfuno zeefilimu ezahlukeneyo. Itheyibhile 7-9 luluhlu lwe-vacuum degree olufunekayo kwinkqubo yokugquma kwiifilimu ezahlukeneyo.
(3) Kwimpompo yokusasazeka kweoyile njengoko inkqubo yokumpompa ephambili ifuna, izinga lokubuya kweoyile yempompo lincinci kangangoko kunokwenzeka, kuba umphunga weoyile obuyayo uya kungcolisa umphezulu wento yokusebenza kwaye ubangele umgangatho wefilimu ukuba wehle. Kwimpompo yokumpompa, iimfuno zomgangatho wefilimu ziphezulu kakhulu kwinkqubo yokugquma, kungcono ukusebenzisa inkqubo yokumpompa engenawo amafutha. Xa usebenzisa inkqubo yokumpompa yempompo yokusasazeka kweoyile, kufuneka ibekwe kwimpompo yokutsalwa kwe-adsorption trap, i-cold trap kunye nezinye izinto, kwaye kufuneka inikele ingqalelo kwi-conductivity yamacandelo ukuqinisekisa ukuba inkqubo yokumpompa igcina isantya esiphezulu sokumpompa.
(4) Izinga lokuvuza kwegumbi lokugquma i-vacuum kunye nenkqubo yalo yokumpompa kufuneka libe lincinci, oko kukuthi, nokuba kukuvuza kwegesi engaphantsi, kuya kuchaphazela umgangatho wefilimu. Ke ngoko, ukuze kuqinisekiswe ukusebenza kokutywinwa kwenkqubo, izinga lokuvuza lilonke lenkqubo kufuneka lilinganiselwe kuluhlu oluvumelekileyo.
(5) Ukusebenza, ukusetyenziswa kunye nokugcinwa kwenkqubo ye-vacuum kufuneka kube lula, kuzinzile kwaye kuthembeke.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Disemba-14-2023