Ukufakwa kwe-ion beam okusizwayo kanye nomthombo we-ion wamandla aphansi

1. Ukufakwa kwe-ion beam okusizwa ukufakwa kusetshenziswa kakhulu i-ion beams enamandla aphansi ukusiza ekuguqulweni kwezinto.

(1) Izici zokufakwa kwe-ion okusizwa yi-ion

Ngesikhathi senqubo yokumboza, izinhlayiya zefilimu ezifakiwe ziqhubeka zihlaselwa ngama-ion ashajiwe avela emthonjeni wama-ion ebusweni be-substrate ngenkathi zimbozwa ngemisebe yama-ion ashajiwe.

(2) Indima yokufakwa kwe-ion esizwayo

Ama-ion anamandla aphezulu ahlasela izinhlayiya zefilimu eziboshwe ngokukhululekile nganoma yisiphi isikhathi; Ngokudlulisela amandla, izinhlayiya ezifakiwe zithola amandla amakhulu e-kinetic, ngaleyo ndlela zithuthukise umthetho we-nucleation kanye nokukhula; Zikhiqiza umphumela wokuminyana ezicutshini ze-membrane nganoma yisiphi isikhathi, okwenza ifilimu ikhule kakhulu; Uma ama-ion egesi asabelayo efakwa, ungqimba lwe-stoichiometric compound lungakhiwa phezu kwezinto, futhi akukho ukuxhumana phakathi kwengqimba ye-compound kanye ne-substrate.

2. Umthombo we-ion wokufakwa kwe-ion beam okusizwa ukufakwa

Isici sokufakwa kwe-ion beam esizwa ukubekwa kwe-ion ukuthi ama-athomu engqimba yefilimu (izinhlayiya zokufakwa) ahlala ehlaselwa ama-ion anamandla aphansi avela emthonjeni we-ion ebusweni be-substrate, okwenza isakhiwo sefilimu sibe sikhulu kakhulu futhi sithuthukise ukusebenza kwengqimba yefilimu. Amandla E engqimba ye-ion angama-≤ 500eV. Imithombo ye-ion esetshenziswa kakhulu ifaka: Umthombo we-ion ka-Kauffman, umthombo we-ion ka-Hall, umthombo we-ion wengqimba ye-anode, umthombo we-cathode ongenalutho Umthombo we-ion ka-Hall, umthombo we-ion wemvamisa yomsakazo, njll.