Ion beam pab deposition thiab qis zog ion qhov chaw

1. Cov kab hluav taws xob ion pab tso tawm feem ntau siv cov kab hluav taws xob qis los pab hloov kho qhov chaw ntawm cov ntaub ntawv.

(1) Cov yam ntxwv ntawm kev pab tso cov ion

Thaum lub sijhawm txheej txheem, cov khoom me me uas tau tso rau hauv zaj duab xis raug foob los ntawm cov ions them los ntawm qhov chaw ion ntawm qhov chaw ntawm lub substrate thaum raug coated nrog cov kab teeb ion them.

(2) Lub luag haujlwm ntawm kev tso cov ion pab

Cov ions muaj zog siab tawg cov zaj duab xis uas tsis khi ua ke txhua lub sijhawm; Los ntawm kev hloov pauv lub zog, cov khoom tso rau hauv tau txais lub zog kinetic ntau dua, yog li txhim kho txoj cai ntawm nucleation thiab kev loj hlob; Tsim cov nyhuv compaction rau ntawm cov ntaub so ntswg membrane txhua lub sijhawm, ua rau zaj duab xis loj hlob ntau dua; Yog tias cov roj ions reactive raug txhaj tshuaj, ib txheej stoichiometric compound tuaj yeem tsim rau ntawm qhov chaw ntawm cov khoom, thiab tsis muaj qhov sib txuas ntawm cov txheej compound thiab cov substrate.

2. Qhov chaw ion rau kev pab tso cov ion beam

Tus yam ntxwv ntawm ion beam pab deposition yog tias cov zaj duab xis txheej atoms (deposition particles) raug bombarded tas li los ntawm cov ions zog tsawg los ntawm qhov chaw ion ntawm qhov chaw ntawm lub substrate, ua rau cov qauv zaj duab xis ntom heev thiab txhim kho kev ua tau zoo ntawm cov zaj duab xis txheej. Lub zog E ntawm ion beam yog ≤ 500eV. Cov chaw ion siv feem ntau suav nrog: Kauffman ion source, Hall ion source, anode txheej ion source, hollow cathode Hall ion source, radio frequency ion source, thiab lwm yam.