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Isha ion-ka ee ka caawisa dhigista iftiinka Ion iyo isha ion-ka oo tamar yar leh

Isha maqaalka: Zhenhua vacuum
Akhri: 10
La daabacay: 23-06-30

1. Kaydinta kaalmaynta birta Ion waxay inta badan isticmaashaa alwaaxyada ion-ka tamarta yar si ay uga caawiso wax ka beddelka dusha sare ee walxaha.

Qalabka dahaarka magnetron-ka gaarka ah ee qaybaha birta ee heerka sare ah

(1) Astaamaha dhigista ion-ka ee ay caawisay

Inta lagu jiro habka dahaarka, walxaha filimka la dhigay waxaa si joogto ah u duqeeya ayoonnada laga soo dallacay isha ayoonnada ee dusha sare ee substrate-ka iyadoo lagu dahaadhay alwaaxyo ayoon ah oo la dallacay.

(2) Doorka dhigista ion-ka ee ay caawisay

Ion-yada tamarta sare leh waxay duqeeyaan walxaha filimka ee si dabacsan u xiran wakhti kasta; Iyagoo wareejinaya tamarta, walxaha la dhigay waxay helaan tamar firfircoon oo weyn, taasoo hagaajinaysa sharciga nucleation-ka iyo koritaanka; Soo saar saameyn isku-dhafan oo ku saabsan unugyada xuubka wakhti kasta, taasoo ka dhigaysa filimku inuu si cufan u koro; Haddii ion-yada gaaska ee fal-celinta ah la duro, lakab isku-dhafan oo stoichiometric ah ayaa laga samayn karaa dusha sare ee maaddada, mana jiro wax isku-xir ah oo u dhexeeya lakabka isku-dhafka ah iyo substrate-ka.

2. Isha Ion ee kaydinta ion-ka ee ka caawisa ion-ka

Astaamaha kaydinta ion-ka ee ka caawisa ion-ka ayaa ah in atamka lakabka filimka (walxaha dejinta) ay si joogto ah u duqeeyaan ion-yada tamar yar ee ka imanaya isha ion-ka ee dusha sare ee substrate-ka, taasoo ka dhigaysa qaab-dhismeedka filimka mid aad u cufan oo hagaajinaysa waxqabadka lakabka filimka. Tamarta E ee ion-ka waa ≤ 500eV. Ilaha ion-ka ee si caadi ah loo isticmaalo waxaa ka mid ah: isha ion-ka Kauffman, isha ion-ka Hall, isha ion-ka anode ee lakabka anode, cathode-ka godka ah isha ion-ka Hall, isha ion-ka ee soo noqnoqda raadiyaha, iwm.


Waqtiga boostada: Juun-30-2023