Kuyika kwa ion beam ndi gwero la ion lochepa mphamvu

1. Kuyika kwa chitsulo cha ioni pogwiritsa ntchito chitsulo chotsika mphamvu kumagwiritsa ntchito chitsulo cha ioni chotsika mphamvu kuti chithandize kusintha pamwamba pa zinthu.

(1) Makhalidwe a ion supported deposition

Pa nthawi yopaka utoto, tinthu ta filimu tomwe timasungidwa timawombedwa nthawi zonse ndi ma ayoni omwe amaperekedwa kuchokera ku gwero la ma ayoni pamwamba pa substrate pamene akupakidwa ndi ma ayoni omwe amaperekedwa utoto.

(2) Udindo wa ion yothandizira kuyika

Ma ayoni amphamvu kwambiri amaphulitsa tinthu ta filimu tomangika momasuka nthawi iliyonse; Mwa kusamutsa mphamvu, tinthu tomwe timasungidwa timapeza mphamvu zambiri za kinetic, motero timawongolera lamulo la nucleation ndi kukula; Zimapanga mphamvu yolimba pa minofu ya nembanemba nthawi iliyonse, zomwe zimapangitsa kuti filimuyo ikule kwambiri; Ngati ma ayoni a mpweya wochitapo kanthu alowetsedwa, gawo la stoichiometric compound lingapangidwe pamwamba pa chinthucho, ndipo palibe kulumikizana pakati pa gawo la compound ndi substrate.

2. Gwero la ayoni lothandizira kuyika kwa ion beam

Khalidwe la ma ion beam assistant deposition ndilakuti maatomu a filimu layer (tinthu ta deposition) amawombedwa nthawi zonse ndi ma ion ochepa mphamvu ochokera ku ion source pamwamba pa substrate, zomwe zimapangitsa kuti kapangidwe ka filimu kakhale kolimba kwambiri ndikukweza magwiridwe antchito a filimu layer. Mphamvu E ya ion beam ndi ≤ 500eV. Magwero a ion omwe amagwiritsidwa ntchito kwambiri ndi awa: Kauffman ion source, Hall ion source, anode layer ion source, hollow cathode Hall ion source, radio frequency ion source, ndi zina zotero.