I-ion beam isiza ukufakwa kanye nomthombo we-ion wamandla aphansi

I-1.Ion beam esiza ukubekwa ikakhulukazi isebenzisa imishayo ye-ion yamandla aphansi ukuze isize ekuguqulweni kwendawo yezinto.

(1) Izici zokufakwa kwe-ion kusizwa

Phakathi nenqubo yokumboza, izinhlayiya zefilimu ezidiphozithiwe ziqhubeka nokubhonjwa ama-ion ashajiwe asuka kumthombo we-ion ongaphezulu kwe-substrate kuyilapho embozwa ngemishayo ye-ion eshajiwe.

(2) Indima ye-ion esiza ukubekwa

Ama-ion anamandla aphezulu aqhuma izinhlayiya zefilimu eziboshwe ngokuxekethile nganoma yisiphi isikhathi; Ngokudlulisela amandla, izinhlayiya ezifakiwe zithola amandla amakhulu e-kinetic, ngaleyo ndlela zithuthukise umthetho we-nucleation nokukhula; Khiqiza umphumela wokuhlanganisa kuzicubu ze-membrane nganoma yisiphi isikhathi, okwenza ifilimu ikhule kakhulu; Uma ama-ion egesi asebenzayo ejovwa, ungqimba oluhlanganisiwe lwe-stoichiometric lungakhiwa ebusweni bento, futhi akukho ukuxhumana phakathi kongqimba oluhlanganisiwe kanye ne-substrate.

2. Umthombo we-ion we-ion beam esizwayo

Isici sokufakwa okusizwa kwe-ion beam ukuthi ama-athomu ongqimba lwefilimu (izinhlayiya zokubeka) ahlala ehlaselwa ama-ion aphansi avela emthonjeni we-ion ebusweni be-substrate, okwenza ukwakheka kwefilimu kuminyene kakhulu futhi kuthuthukise ukusebenza kongqimba lwefilimu. Amandla E we-ion beam ngu-≤ 500eV. Imithombo ye-ion evame ukusetshenziswa ihlanganisa: Umthombo we-ion we-Kauffman, umthombo we-ion we-Hall, umthombo we-ion we-anode, umthombo we-ion we-cathode yehholo, umthombo we-ion wefrikhwensi yomsakazo, njll.