I-reactive magnetron sputtering isho ukuthi igesi esebenzayo inikezwa ukuze isabele ngezinhlayiya ezifafaziwe ngesikhathi sokufafaza ukuze kukhiqizwe ifilimu eyinhlanganisela. Ingakwazi ukunikeza igesi esebenzayo ukuze isabele ngethagethi ehlanganisiwe e-sputtering ngesikhathi esifanayo, futhi inganikeza igesi esebenzayo ukuze isabele ngensimbi efafazayo noma ingxubevange eqondiwe ngesikhathi esifanayo ukulungisa ifilimu eyinhlanganisela enesilinganiso samakhemikhali esinikeziwe.
(1) Izinto ezihlosiwe ezisetshenziselwa ukuphalaza kwe-magnetron esebenzayo (ithagethi yesici esisodwa noma i-multi-element target) namagesi okusabela kulula ukuthola ukuhlanzeka okuphezulu, okuhambisana nokulungiswa kwamafilimu ayinhlanganisela anobumsulwa obuphezulu.
(2) Ku-sputtering ye-magnetron esebenzayo, ngokulungisa imingcele yenqubo yokubeka, isilinganiso samakhemikhali noma isilinganiso esingezona samakhemikhali samafilimu ayinhlanganisela singalungiselelwa, ukuze kufezwe injongo yokulawula izici zefilimu ngokulungisa ukwakheka kwefilimu.
(3) Izinga lokushisa le-substrate ngokuvamile aliphezulu kakhulu ngesikhathi senqubo yokubeka i-magnetron sputtering esebenzayo, futhi inqubo yokwenza ifilimu ngokuvamile ayidingi ukuthi i-substrate ishiselwe kumazinga okushisa aphakeme kakhulu, ngakho-ke kunemikhawulo embalwa kokusebenza kwe-substrate.
(4) I-reactive magnetron sputtering ifaneleka ekulungiseni amafilimu azacile acishe abe yi-homogeneous endaweni enkulu, futhi ingafinyelela ukukhiqizwa kwezezimboni ngomkhiqizo wonyaka wamamitha-skwele ayisigidi wokuhlanganisa emshinini owodwa. Ezimweni eziningi, imvelo yefilimu ingashintshwa ngokumane uguqule isilinganiso segesi esebenzayo ibe igesi engasebenzi ngesikhathi sokufafaza. Isibonelo, ifilimu ingashintshwa isuka ensimbi iye ku-semiconductor noma engeyona eyensimbi.
——Le ndatshana ineumenzi womshini we-vacuum coatingI-Guangdong Zhenhua ikhishwe
Isikhathi sokuthumela: Aug-31-2023