Ko te tikanga o te mimiha magnetron tauhohe ko te tukunga o te hau tauhohe hei tauhohe ki ngā matūriki mimiha i roto i te tukanga mimiha hei whakaputa i tētahi kiriata matū. Ka taea e ia te tuku i te hau tauhohe hei tauhohe ki te ūnga matū mimiha i te wā kotahi, ā, ka taea hoki e ia te tuku i te hau tauhohe hei tauhohe ki te konganuku mimiha, ki te ūnga koranu rānei i te wā kotahi hei whakarite i tētahi kiriata matū me tētahi ōwehenga matū kua whakaritea. Ko ngā āhuatanga o te mimiha magnetron tauhohe hei whakarite i ngā kiriata matū ko:
(1) He ngāwari te whiwhi i te parakore teitei mō ngā rauemi ūnga e whakamahia ana mō te pupuhi magnetron tauhohe (whāinga huānga kotahi, whāinga huānga maha rānei) me ngā hau tauhohe, he mea e pai ana mō te whakarite i ngā kiriata matū parakore teitei.
(2) I roto i te whakapūtanga magnetron tauhohe, mā te whakarerekē i ngā tawhā tukanga whakatakotoranga, ka taea te whakarite i te ōwehenga matū, te ōwehenga kore-matū rānei o ngā kiriata matū, kia tutuki ai te kaupapa o te whakahaere i ngā āhuatanga o te kiriata mā te whakarerekē i te hanganga o te kiriata.
(3) Kāore te pāmahana o te papa i te tino teitei i te wā o te tukanga whakatakoto i te magnetron sputtering tauhohe, ā, ko te tikanga, kāore e hiahiatia kia wera te papa ki ngā pāmahana tino teitei mō te tukanga hanga kiriata, nō reira he iti ake ngā here i runga i te rauemi papa.
(4) He pai te whakamahi i te magnetron sputtering tauhohe mō te whakarite i ngā kiriata angiangi ōrite-rahi, ā, ka taea te whakatutuki i te whakaputanga ahumahi me te putanga ā-tau o te kotahi miriona mita pūrua o te paninga mai i te mīhini kotahi. I roto i te nuinga o ngā wā, ka taea te whakarerekē i te āhua o te kiriata mā te whakarerekē noa i te ōwehenga o te hau tauhohe ki te hau kore mahi i te wā e sputtering ana. Hei tauira, ka taea te whakarerekē i te kiriata mai i te konganuku ki te hau haurua-ira, te kore-konganuku rānei.
——Kei roto i tēnei tuhingakaihanga mīhini paninga korehauI tukuna a Guangdong Zhenhua
Wā tuku: 31 o Ākuhata-2023