Ukutshiza ngemagnetron esebenzayo kuthetha ukuba igesi esebenzayo inikezelwa ukuze isabelane namasuntswana atshiza ngexesha lokutshiza ukuvelisa ifilimu edibeneyo. Ingabonelela ngegesi esebenzayo ukuze isabelane nethagethi yecompound yokutshiza ngaxeshanye, kwaye ingabonelela ngegesi esebenzayo ukuze isabelane nentsimbi yokutshiza okanye ithagethi ye-alloy ngaxeshanye ukulungiselela ifilimu edibeneyo enomlinganiselo othile wekhemikhali. Iimpawu zokutshiza ngemagnetron esebenzayo ukulungiselela iifilimu ezidibeneyo zezi:
(1) Izixhobo ekujoliswe kuzo ezisetyenziselwa ukutshiza i-reactive magnetron (ithagethi yento enye okanye ithagethi ye-multi-element) kunye neegesi zokusabela kulula ukuzifumana zicocekile kakhulu, nto leyo enceda ekulungiseleleni iifilimu ze-compound ezicocekileyo kakhulu.
(2) Kwi-reactive magnetron sputtering, ngokulungelelanisa iiparameter zenkqubo yokubeka, umlinganiselo weekhemikhali okanye umlinganiselo ongengowekhemikhali weefilimu ezidityanisiweyo unokulungiswa, ukuze kufezekiswe injongo yokulawula iimpawu zefilimu ngokulungelelanisa ukwakheka kwefilimu.
(3) Ubushushu be-substrate ngokubanzi abuphezulu kakhulu ngexesha lenkqubo yokufakwa kwe-reactive magnetron sputtering, kwaye inkqubo yokwenza ifilimu ayifuni ukuba i-substrate ifudunyezwe kumaqondo obushushu aphezulu kakhulu, ngoko ke kukho imiqathango embalwa kwizinto ze-substrate.
(4) Ukutshiza ngemagnetron esebenzayo kufanelekile ukulungiselela iifilimu ezincinci ezilinganayo kwindawo enkulu, kwaye kunokufezekisa imveliso yemizi-mveliso ngemveliso yonyaka yesigidi seemitha zesikwere zokugquma ezivela kumatshini omnye. Kwiimeko ezininzi, uhlobo lwefilimu lungatshintshwa ngokutshintsha nje umlinganiselo wegesi esabelayo kwigesi engasebenziyo ngexesha lokutshiza. Umzekelo, ifilimu ingatshintshwa ukusuka kwisinyithi ukuya kwi-semiconductor okanye engeyiyo isinyithi.
——Eli nqaku lineumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua wakhululwa
Ixesha lokuthumela: Agasti-31-2023