Buufinta magnetron-ka ee falcelinta leh macnaheedu waa in gaaska falcelinta leh la bixiyo si uu ula falgalo walxaha buufinta leh inta lagu jiro buufinta si loo soo saaro filim isku dhafan. Waxay bixin kartaa gaas falcelin leh si ay ula falgasho bartilmaameedka isku-dhafka ah isla waqtigaas, waxayna sidoo kale keeni kartaa gaas falcelin leh si ay ula falgasho bartilmaameedka birta buufinta leh ama daawaha isku mar si loo diyaariyo filim isku-dhafan oo leh saamiga kiimikada la bixiyay. Astaamaha buufinta magnetron-ka ee falcelinta leh si loo diyaariyo filimada isku-dhafka ah waa:
(1) Agabka bartilmaameedka ah ee loo isticmaalo faafinta magnetron-ka falcelinta leh (bartilmaameed hal curiye ah ama bartilmaameed badan) iyo gaasaska falcelinta waa kuwo si fudud loo heli karo daahirnimo sare, taas oo sahlaysa diyaarinta filimada isku-dhafka ah ee saafinimada sare leh.
(2) Marka la isticmaalayo magnetron sputtering, iyadoo la hagaajinayo xuduudaha habka dhigista, saamiga kiimikada ama saamiga aan kiimikada ahayn ee filimada isku dhafan ayaa la diyaarin karaa, si loo gaaro ujeeddada nidaaminta astaamaha filimka iyadoo la hagaajinayo halabuurka filimka.
(3) Heerkulka substrate-ka guud ahaan ma aha mid aad u sarreeya inta lagu jiro habka kaydinta magnetron-ka ee falcelinta leh, habka sameynta filimkuna badanaa uma baahna in substrate-ka lagu kululeeyo heerkul aad u sarreeya, sidaa darteed waxaa jira xaddidaadyo yar oo ku saabsan walxaha substrate-ka.
(4) Buufinta magnetron-ka ee falcelinta leh waxay ku habboon tahay diyaarinta filimaan khafiif ah oo isku mid ah oo baaxad weyn leh, waxayna gaari kartaa wax soo saar warshadeed oo leh wax soo saar sannadle ah oo ah hal milyan oo mitir oo laba jibbaaran oo dahaar ah oo laga soo saaro hal mashiin. Xaalado badan, dabeecadda filimka waxaa lagu beddeli karaa iyadoo si fudud loo beddelo saamiga gaaska falcelinta leh iyo gaaska aan firfircoonayn inta lagu jiro buufinta. Tusaale ahaan, filimka waxaa laga beddeli karaa bir ilaa semiconductor ama aan bir ahayn.
——Maqaalkani wuxuu leeyahaysoo saaraha mashiinka dahaadhka faakuumkaGuangdong Zhenhua ayaa la sii daayay
Waqtiga boostada: Agoosto-31-2023