Kufotokozera mafilimu opyapyala opangidwa ndi reactive magnetron sputtering

Kutulutsa mpweya wochita kupopera kwa magnetron kumatanthauza kuti mpweya wochita kupopera umaperekedwa kuti ugwirizane ndi tinthu tating'onoting'ono tomwe timapopera kuti tipange filimu yophatikizika. Imatha kupereka mpweya wochita kupopera kuti ugwirizane ndi cholinga cha compound chopopera nthawi imodzi, komanso imatha kupereka mpweya wochita kupopera kuti ugwirizane ndi chitsulo chopopera kapena chandamale chopopera nthawi imodzi kuti ikonze filimu yophatikizika yokhala ndi chiŵerengero cha mankhwala. Makhalidwe a kutulutsa mpweya wochita kupopera kwa magnetron pokonzekera mafilimu ophatikizika ndi awa:

(1) Zipangizo zomwe zimagwiritsidwa ntchito popopera maginito (single element target kapena multi-element target) ndi mpweya wochitapo kanthu zimakhala zosavuta kupeza chiyero chapamwamba, zomwe zimathandiza kukonzekera mafilimu ophatikizana oyeretsa kwambiri.

(2) Mu reactive magnetron sputtering, mwa kusintha magawo a njira yoperekera, chiŵerengero cha mankhwala kapena chiŵerengero chosakhala cha mankhwala cha mafilimu ophatikizika chingakonzedwe, kuti akwaniritse cholinga chowongolera makhalidwe a filimuyo mwa kusintha kapangidwe ka filimuyo.

(3) Kutentha kwa substrate nthawi zambiri sikukhala kokwera kwambiri panthawi ya reactive magnetron sputtering deposition process, ndipo njira yopangira filimu nthawi zambiri siimafuna kuti substrate itenthedwe kutentha kwambiri, kotero pali zoletsa zochepa pa zinthu za substrate.

(4) Kupopera kwa magnetron kogwira ntchito ndikoyenera kukonzekera mafilimu opyapyala okhala ndi malo akuluakulu, ndipo kumatha kupanga mafakitale ndi kutulutsa kwapachaka kwa mita imodzi ya sikweya mita imodzi kuchokera ku makina amodzi. Nthawi zambiri, mtundu wa filimuyo ungasinthidwe pongosintha chiŵerengero cha mpweya wolowerera ku mpweya wosagwira ntchito panthawi yopopera. Mwachitsanzo, filimuyo ingasinthidwe kuchoka pa chitsulo kupita ku semiconductor kapena yosakhala yachitsulo.

——Nkhaniyi yakhala ndiwopanga makina ophikira vacuumGuangdong Zhenhua anamasulidwa