Halayyar fina-finan siriri masu hade da aka shirya ta hanyar amfani da magnetron sputtering

Magnetron sputtering yana nufin cewa ana samar da iskar gas mai amsawa don yin martani da barbashi masu fashewa yayin aiwatar da sputtering don samar da fim ɗin mahadi. Yana iya samar da iskar gas mai amsawa don yin martani tare da manufa ta mahadi mai fashewa a lokaci guda, kuma yana iya samar da iskar gas mai amsawa don yin martani tare da ƙarfe mai fashewa ko makasudin gami a lokaci guda don shirya fim ɗin mahadi tare da rabon sinadarai da aka bayar. Halayen magnetron mai amsawa don shirya fina-finan mahadi sune:

(1) Kayan da ake amfani da su wajen yin amfani da sinadarin magnetron (maƙasudin abu ɗaya ko kuma nau'in abu da yawa) da kuma iskar gas mai amsawa suna da sauƙin samun tsarki mai yawa, wanda hakan ke taimakawa wajen shirya fina-finan sinadarai masu tsafta.

(2) A cikin amsawar magnetron sputtering, ta hanyar daidaita sigogin tsarin ajiya, ana iya shirya rabon sinadarai ko rabon da ba na sinadarai ba na fina-finan mahadi, don cimma manufar daidaita halayen fim ɗin ta hanyar daidaita abun da ke cikin fim ɗin.

(3) Zafin substrate ɗin gabaɗaya bai yi yawa ba yayin aikin adana magnetron sputtering mai amsawa, kuma tsarin samar da fim ɗin yawanci baya buƙatar a dumama substrate ɗin zuwa yanayin zafi mai yawa, don haka akwai ƙarancin ƙuntatawa akan kayan substrate.

(4) Magnetron sputtering mai amsawa ya dace da shirya manyan fina-finai masu kama da juna, kuma yana iya cimma samarwa a masana'antu tare da fitar da murabba'in mita miliyan ɗaya na shafi a kowace shekara daga injin guda ɗaya. A lokuta da yawa, ana iya canza yanayin fim ɗin ta hanyar canza rabon iskar gas mai amsawa zuwa iskar gas mara aiki yayin sputtering. Misali, ana iya canza fim ɗin daga ƙarfe zuwa semiconductor ko mara ƙarfe.

——Wannan rubutun ya ƙunshiinjin shafa injin injinAn saki Guangdong Zhenhua