Gutera amashanyarazi hakoreshejwe magnetron bivuze ko gazi ikora ikoreshwa kugira ngo ikoreshwe hamwe n'uduce twangiritse mu gihe cyo gutera amashanyarazi kugira ngo ikore filime ivanze. Ishobora gutanga gazi ikora ikoreshwa kugira ngo ikoreshwe hamwe n'ikintu gitera amashanyarazi icyarimwe, kandi ishobora no gutanga gazi ikora ikoreshwa kugira ngo ikoreshwe hamwe n'icyuma gitera amashanyarazi cyangwa icyuma gitera amashanyarazi icyarimwe kugira ngo itegure filime ivanze ifite igipimo cya shimi. Ibiranga gazi ikora ikoreshwa hakoreshejwe magnetron mu gutegura filime zivanze ni ibi bikurikira:
(1) Ibikoresho bikoreshwa mu gukurura magnetron (ikintu kimwe cyangwa ikintu kinini) hamwe n'imyuka ikoreshwa mu gukurura amashanyarazi biroroshye kubona ubuziranenge bwinshi, ibyo bikaba byorohereza gutegura filime zivanze zifite ubuziranenge bwinshi.
(2) Mu gusohora icyuma gikoresha magnetron, hakoreshejwe uburyo bwo guhindura imiterere y’ibipimo, igipimo cya shimi cyangwa igipimo kitari shimi cya filime zivanze bishobora gutegurwa, kugira ngo intego yo kugenzura imiterere ya filime igerweho binyuze mu guhindura imiterere ya filime.
(3) Ubushyuhe bw'icyuma muri rusange ntibuba buri hejuru cyane mu gihe cyo gushyiramo magnetron sputtering, kandi uburyo bwo gukora filime akenshi ntibusaba ko icyuma gishyushya kugeza ku bushyuhe bwinshi cyane, bityo hakabaho imbogamizi nke ku bikoresho bya icyuma.
(4) Gukoresha magnetron sputtering birakwiriye mu gutegura filime ntoya zo mu buso bunini, kandi bishobora kugera ku musaruro w’inganda hamwe n’umusaruro wa metero kare miliyoni imwe ku mwaka w’imashini imwe. Kenshi na kenshi, imiterere ya filime ishobora guhinduka hakoreshejwe guhindura gusa igipimo cya gazi ikora na gazi idafite ingufu mu gihe cyo gukoresha sputtering. Urugero, filime ishobora guhinduka kuva ku cyuma ikajya kuri semiconductor cyangwa idafite icyuma.
——Iyi nkuru ifiteuruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua yarekuwe
Igihe cyo kohereza: Kanama-31-2023