I-Ion beam incedise ukubekwa kunye nomthombo we-ion wamandla aphantsi

I-1.Ion beam encediswayo yokubeka ikakhulu isebenzisa imiqadi ye-ion yamandla aphantsi ukunceda ukuguqulwa komphezulu wezinto.

(1) Iimpawu ze-ion ezincedisiweyo zokubeka

Ngethuba lenkqubo yokugubungela, iinqununu zefilimu ezifakwe ngokuqhubekayo zihlanjululwa ngee-ion ezihlawuliswayo ezivela kumthombo we-ion kumphezulu we-substrate ngelixa zifakwe kwimiqadi ye-ion ehlawulisiweyo.

(2) Indima ye-ion incedise ukubekwa

Iiyoni zamandla aphezulu zibhobhoza amasuntswana efilim ebotshelelwe ngokukhululekileyo nangaliphi na ixesha; Ngokudlulisela amandla, iinqununu ezifakweyo zifumana amandla amakhulu e-kinetic, ngaloo ndlela iphucula umthetho we-nucleation kunye nokukhula; Ukuvelisa umphumo wokudibanisa kwi-membrane tissue naliphi na ixesha, okwenza ifilimu ikhule ngakumbi; Ukuba i-ion ye-gas esebenzayo ifakwe, i-stoichiometric i-compound layer inokuqulunqwa kumphezulu wezinto eziphathekayo, kwaye akukho jongano phakathi kwe-compound layer kunye ne-substrate.

2. Umthombo we-ion we-ion beam encediswayo yokubeka

Uphawu lwe-ion beam encediswayo yokubeka i-athomu ye-athomu yefilimu (i-deposition particles) iqhutyelwe ngokuqhubekayo yi-ion yamandla aphantsi ukusuka kumthombo we-ion kumphezulu we-substrate, okwenza ukuba isakhiwo sefilimu sibe nzima kakhulu kwaye siphucule ukusebenza kwefilimu. Amandla E we-ion beam ngu ≤ 500eV. Imithombo ye-ion esetyenziswa ngokuqhelekileyo ibandakanya: Umthombo we-ion kauffman, umthombo we-ion weHolo, umthombo we-ion we-anode, umthombo ongenanto we-cathode I-Holl ion source, umthombo we-ion frequency, njl.