I-reactive magnetron sputtering ithetha ukuba irhasi esebenzayo ibonelelwa ukuba isabele kunye namasuntswana achithekileyo kwinkqubo yokutshiza ukuvelisa ifilimu edibeneyo. Inokubonelela ngerhasi esebenzayo ukusabela kunye nethagethi yekhompawundi e-sputtering ngexesha elinye, kwaye inokubonelela ngerhasi esebenzayo ukusabela kunye nentsimbi yokutshiza okanye i-alloy target ngaxeshanye ukulungiselela ifilimu edibeneyo kunye nomlinganiselo onikiweyo wekhemikhali.
(1) Izinto ekujoliswe kuzo ezisetyenziselwa i-reactive magnetron sputtering (into enye ekujoliswe kuyo okanye i-multi-element target) kunye ne-reaction gases kulula ukufumana ukucoceka okuphezulu, okuhambelana nokulungiswa kweefilimu ezihlangeneyo ezicocekileyo.
(2) Kwi-reactive magnetron sputtering, ngokulungelelanisa imilinganiselo yenkqubo yokubeka, umlinganiselo wekhemikhali okanye umlinganiselo ongeyokhemikhali wefilimu edibeneyo unokulungiswa, ukuze kufezekiswe injongo yokulawula iimpawu zefilimu ngokulungelelanisa ukubunjwa kwefilimu.
(3) Iqondo lobushushu le-substrate alikho phezulu kakhulu ngexesha lenkqubo yokubeka i-magnetron sputtering esebenzayo, kwaye inkqubo yokwenza ifilim ayifuni ukuba i-substrate ifudunyezwe kumaqondo obushushu aphezulu kakhulu, ngoko kukho izithintelo ezimbalwa kwi-substrate material.
(4) I-reactive magnetron sputtering ilungele ukulungiswa kweefilim ezibhityileyo ezinobukhulu obufanayo, kwaye inokufikelela kwimveliso ephuculweyo kunye nemveliso yonyaka yesigidi seemitha ezisikweri zokwaleka kumatshini omnye. Kwiimeko ezininzi, ubume befilimu bunokutshintshwa ngokutshintsha nje umlinganiselo wegesi esebenzayo kwigesi engasebenziyo ngexesha lokutshiza. Ngokomzekelo, ifilimu inokutshintshwa kwisinyithi ukuya kwi-semiconductor okanye i-non-metal.
——Eli nqaku liye latshoumenzi womatshini wokugqumaGuangdong Zhenhua wakhululwa
Ixesha lokuposa: Aug-31-2023