Thepa e sebelisa haholo mouoane oa lik'hemik'hale ho lokisa filimi ea oxide, e nang le litšobotsi tsa sekhahla sa deposition se potlakileng le boleng bo holimo ba filimi. Ha e le sebopeho sa thepa, mohaho oa menyako o habeli o sebelisetsoa ho ntlafatsa katleho ea ho koala, 'me mokhoa oa morao-rao oa phepelo ea khase ea mokelikeli o amoheloa ho netefatsa phallo e tsitsitseng le e laoloang le ho netefatsa hore ts'ebetso e tsitsitse. Filimi e lokiselitsoeng ke thepa e na le mokoallo o motle oa mouoane oa metsi le nako e telele e tsitsitseng tekong ea ho belisa.
Thepa e ka sebelisoa ho tšepe e sa hloekang, li-electroplated hardware / likarolo tsa polasetiki, khalase, li-ceramics le lisebelisoa tse ling, tse kang lihlahisoa tsa elektronike, lifaha tse khanyang tsa LED, lisebelisoa tsa bongaka le lihlahisoa tse ling tse hlokang ho hanyetsa oxidation. Filimi ea SiOx barriers e lokiselitsoe haholo ho thibela mouoane oa metsi ka nepo, ho thibela kutu le oxidation, le ho ntlafatsa bophelo ba sehlahisoa.
| Mehlala ea boikhethelo | boholo ba kamore e ka hare |
| ZHCVD1200 | φ1200*H1950(mm) |