Cov khoom siv feem ntau siv cov tshuaj lom neeg vapor deposition los npaj cov zaj duab xis oxide, uas muaj cov yam ntxwv ntawm kev tso tawm sai thiab zoo ntawm zaj duab xis. Raws li cov qauv khoom siv, ob lub qhov rooj qauv siv los txhim kho qhov clamping efficiency, thiab cov kua roj tshiab kawg tau txais yuav los xyuas kom meej tias cov dej ntws ruaj khov thiab tswj tau thiab ua kom zoo kom ntseeg tau tias cov txheej txheem ruaj khov. Cov zaj duab xis uas cov khoom siv npaj muaj cov dej vapor barrier zoo thiab lub sijhawm ruaj khov ntev dua hauv kev sim npau.
Cov khoom siv no siv tau rau cov hlau tsis xeb, cov khoom siv kho vajtse / cov khoom yas electroplated, iav, ceramics thiab lwm yam khoom siv, xws li cov khoom siv hluav taws xob, cov teeb LED, cov khoom siv kho mob thiab lwm yam khoom uas xav tau kev tiv thaiv oxidation. SiOx barrier zaj duab xis feem ntau yog npaj los thaiv cov pa dej, tiv thaiv kev xeb thiab oxidation, thiab txhim kho lub neej khoom.
| Cov qauv xaiv tau | qhov loj ntawm lub chamber sab hauv |
| ZHCVD1200 | φ1200 * H1950 (hli) |