Theknoloji ea ho roala ka vacuum e fana ka melemo e 'maloa ea bohlokoa, ho kenyeletsoa botsoalle ba tikoloho, bokhoni bo phahameng, ho tšoana hantle ha filimi, le ho ba le sekoli se phahameng. Lisebelisoa tsa ho roala ka vacuum ka kakaretso li ka aroloa ka mefuta e latelang:
1. Lisebelisoa tsa ho tlosa mouoane oa 'mele (PVD)
1.1 Lisebelisoa tsa ho Koahela Mouoane oa Vacuum
Seaparo sa mouoane sa vacuum se kenyeletsa haholo-holo: ho hanyetsa mouoane oa ho futhumatsa; mouoane oa mahlaseli a elektrone, o tsejoang hape e le mouoane oa mahlaseli a E-beam
1.2 Lisebelisoa tsa ho Koahela ka ho Hlakola
Lisebelisoa tsa ho roala tse nang le sputtering li kenyelletsa haholo-holo: ho sputtering ea DC; ho sputtering ea RF; ho sputtering ea maqhubu a mahareng
1.3 Lisebelisoa tsa ho betla ka Ion
Lisebelisoa tsa ho betla ion li kenyelletsa haholo-holo: ho betla ion ea arc ea cathodic
2. Lisebelisoa tsa ho Tlosa Mouoane oa Lik'hemik'hale (CVD)
Lisebelisoa tsa ho boloka mouoane oa lik'hemik'hale li ka aroloa ka mefuta e latelang:
2.1 Ho Ntša Mouoane oa K'hemik'hale Khatellong ea Sepakapaka (APCVD)
2.2 Ho Ntša Mouoane oa K'hemik'hale Khatellong e Tlase (LPCVD)
2.3 Ho Ntlafatsoa ha Mouoane oa Lik'hemik'hale oa Plasma (PECVD)
2.4 Tšepe ea Organic Chemical Vapor Deposition (MOCVD)
2.5 Ho Theoha ha Lera la Athomo (ALD)
Liindasteri tsa Kopo
Lisebelisoa tsa ho koahela ka vacuum li sebelisoa haholo liindastering tse fapaneng, ho kenyeletsoa: Li-semiconductor, matla a macha, li-drone, liaparo tse bohlale, lilense tsa optical, likoloi, lisebelisoa tsa elektroniki, thepa ea ka tlung le lisebelisoa tsa ka tlung, lisebelisoa tsa ho hlapela, thepa ea ho paka le karolo ea polasetiki.
-Sengoloa sena se phatlalalitsoe ke moetsi oa lisebelisoa tsa ho roala ka vacuum Letsoho la Zhenhua
Nako ea poso: Mmesa-29-2026