He maha ngā painga matua o te hangarau paninga korehau, tae atu ki te atawhai i te taiao, te tino whai hua, te ōritetanga kiriata tino pai, me te matotoru paninga tino pai. Ko ngā taputapu paninga korehau ka taea te whakarōpū i ngā momo e whai ake nei:
1. Taputapu Whakatakotoranga Kohu Tinana (PVD)
1.1 Taputapu Paninga Whakamomona Korehau
Ko te paninga mimiti korehau te nuinga o te wā: te mimiti wera ātete; te mimiti hihi irahiko, e mōhiotia ana ko te mimiti hihi-E
1.2 Ngā Taputapu Paninga Rehu
Ko ngā taputapu paninga pupuhi ko: Te pupuhi DC; Te pupuhi RF; Te pupuhi auau-waenga
1.3 Taputapu Whakatakotoranga Āniora
Ko ngā taputapu whakakikorua katote ko: te whakakikorua katote pewa katote
2. Taputapu Whakatakotoranga Kohu Matū (CVD)
Ka taea te whakarōpū i ngā taputapu whakatakotoranga kohu matū ki ngā momo e whai ake nei:
2.1 Te Whakatakotoranga Matū o te Kohu i te Pēhanga Hauātea (APCVD)
2.2 Te Whakatakotoranga Kohu Matū Pēhanga Iti (LPCVD)
2.3 Te Whakapūtanga Matū Whakarei Ake i te Plasma (PECVD)
2.4 Te Whakatakotoranga Matū Waro Konganuku (MOCVD)
2.5 Te Whakatakotoranga Papanga Atomika (ALD)
Ngā Ahumahi Taupānga
E whakamahia whānuitia ana ngā taputapu paninga korehau i roto i ngā ahumahi maha, tae atu ki: Ngā Ārahi-ā-hiko, te pūngao hou, ngā waka rererangi korehau, ngā taputapu mau atamai, ngā arotahi whatu, ngā motuka, ngā hikohiko, ngā taonga whare me ngā taputapu whare, ngā taputapu kaukau, ngā rauemi tākai me ngā wāhanga whakapaipai kirihou.
-Nā kaihanga taputapu paninga korehau Zhenhua Vacuum
Wā tuku: 29 Paenga-whāwhā 2026