1.Ion beam e thusang deposition haholo-holo e sebelisa maballo a ion a matla a tlase ho thusa ho feto-fetoha ha thepa.
(1) Litšobotsi tsa ion e thusitseng deposition
Nakong ea ts'ebetso ea ho roala, likaroloana tsa filimi tse kentsoeng li tsoela pele ho hlaseloa ke li-ion tse qosoang tse tsoang mohloling oa ion holim'a substrate ha li ntse li koahetsoe ka maballo a ion a qositsoeng.
(2) Karolo ea ion e thusitse ho beha
Li-ion tsa matla a phahameng li hlasela likaroloana tsa filimi tse hlephileng ka nako efe kapa efe; Ka ho fetisa matla, likaroloana tse behiloeng li fumana matla a matla a kinetic, ka tsela eo, ho ntlafatsa molao oa nucleation le kholo; Hlahisa phello ea compaction ho lisele tsa lera ka nako leha e le efe, ho etsa hore filimi e hōle haholoanyane; Haeba li-ion tsa khase tse sebetsang li kenngoa, lesela la motsoako oa stoichiometric le ka thehoa holim'a thepa, 'me ha ho na sebopeho pakeng tsa lera la motsoako le substrate.
2. Mohloli oa ion bakeng sa beam ea ion o thusitse deposition
Tšobotsi ea ion beam e thusitseng deposition ke hore liathomo tsa lera la filimi (likaroloana tsa deposition) li lula li hlaseloa ke li-ion tse tlase tsa matla tse tsoang mohloling oa ion holim'a substrate, e leng se etsang hore sebopeho sa filimi se teteane haholo le ho ntlafatsa ts'ebetso ea lera la filimi. Matla E a beam ea ion ke ≤ 500eV. Mehloli e tloaelehileng ea ion e kenyelletsa: mohloli oa ion oa Kauffman, mohloli oa ion oa Hall, mohloli oa ion oa anode, mohloli oa cathode Hall ion mohloli, mohloli oa radio frequency ion, joalo-joalo.
Nako ea poso: Jun-30-2023