1.Ion beam kaalmay dhigis inta badan waxay isticmaashaa laydhka ion tamar hooseeya si ay uga caawiso wax ka bedelka alaabta.
(1) Astaamaha dhigaalka ion ee la caawiyay
Inta lagu jiro habka daahan, qaybaha filimka la xareeyay ayaa si joogto ah loogu duqeeyaa ions laga soo qaaday isha ion ee dusha sare ee substrate-ka iyadoo lagu daboolay alwaaxyo ion ah.
(2) Doorka ion-ku-dhigista ee caawiyay
Ayoonada tamarta sare waxay garaacdaa qaybaha filimka dabacsan ee ku xidhan wakhti kasta; Marka la wareejiyo tamarta, qaybaha kaydsan waxay helayaan tamar kinetic oo weyn, taas oo hagaajinaysa sharciga nucleation-ka iyo koritaanka; Soo saar saameyn isku-duubni ah oo ku saabsan unugyada xuubka wakhti kasta, samaynta filimku si cufan u koraan; Haddii ion gaas fal-celin ah lagu duro, lakabka isku-dhafan ee stoichiometric ayaa laga samayn karaa dusha maaddada, mana jiro wax is-dhexgal ah oo u dhexeeya lakabka dhismaha iyo substrate-ka.
2. Ion isha laga helo ion beam caawin dhigasho
Dabeecadda ion beam-ka caawinta dhigaalka waa in atomyada lakabka filimka (qaybaha kaydinta) ay si joogto ah u duqeeyaan ions tamar hooseeya oo ka yimaada isha ion ee dusha sare ee substrate-ka, samaynta qaabka filimka oo aad u cufan iyo hagaajinta waxqabadka lakabka filimka. Tamarta E ee iftiinka ion waa ≤ 500eV. Ilaha ion ee sida caadiga ah loo isticmaalo waxaa ka mid ah: Isha Kauffman ion, Isha Hall ion, isha lakabka anode, isha godka ee cathode Hall ion, isha inta jeer ee raadiyaha, iwm.
Waqtiga boostada: Juun-30-2023