Soo saarista magnetron-ka falcelinta macneheedu waxa weeye in gaas fal-celin ah la keeno si uu uga falceliyo qaybo wasakhaysan habka loo soo saaro filim isku dhafan. Waxay siin kartaa gaas fal-celin ah si ay uga falceliso bartilmaameedka isku dhafka ah ee isku mar, waxayna sidoo kale siin kartaa gaas fal-celin ah si ay uga fal-celiso birta sputtering ama bartilmaameedka daawaha waqti isku mid ah si ay u diyaariso filim isku-dar ah oo leh saamiga kiimikaad ee la siiyay. Tilmaamaha fal-celinta magnetron-ka falcelinta si loo diyaariyo filimada isku-dhafan waa:
(1) Qalabka bartilmaameedka ah ee loo isticmaalo fal-celinta magnetron-ka (bartilmaameedka hal element ama bartilmaameedka multi-element) iyo gaasaska falcelinta way fududahay in la helo nadiif sare, taas oo ku habboon diyaarinta filimada isku-dhafka ah ee nadiifka ah.
(2) In falcelinta magnetron sputtering, by hagaajinta xuduudaheedu habka dhigista, saamiga kiimikada ama non-kiimiko ee filimada xarunta la diyaarin karaa, si loo gaaro ujeedada nidaaminta sifooyinka filimka by hagaajinta ka kooban ee filimka.
(3) Heerkulka substrate-ka guud ahaan ma aha mid aad u sarreeya inta lagu jiro habka kaydinta magnetron-ka falcelinta, iyo habka sameynta filimka sida caadiga ah uma baahna substrate in lagu kululeeyo heerkul aad u sarreeya, sidaas darteed waxaa jira xaddidaadyo yar oo ku saabsan walxaha substrate-ka.
(4) Reactive magnetron sputtering waxay ku habboon tahay diyaarinta aagga weyn ee filimada khafiifka ah ee isku midka ah, waxayna ku gaari kartaa wax soo saarka warshadaha leh wax soo saarka sanadlaha ah ee hal milyan oo mitir oo laba jibbaaran oo daahan hal mashiin ah. Xaalado badan, dabeecadda filimka ayaa lagu beddeli karaa iyada oo si fudud loo beddelo saamiga gaaska falcelinta gaaska aan firfircoonayn inta lagu jiro sputtering. Tusaale ahaan, filimka waxaa laga beddeli karaa birta oo loo beddelo semiconductor ama aan bir ahayn.
——Maqaalkani waxa uu leeyahaysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua ayaa la sii daayay
Waqtiga boostada: Agoosto-31-2023