Ikirahuri cya TGV Binyuze mu Ikoranabuhanga rya Cole: Ibyifuzo byisoko nibibazo bitunganijwe

No.1 Ikirahuri cya TGV Binyuze muri Hole Coating Technology Incamake
Ikirahuri cya TGV Binyuze mu mwobo ni tekinoroji igaragara ya tekinoroji ya elegitoroniki ikubiyemo gukora binyuze mu mwobo uri munsi y’ibirahure no guteranya urukuta rwimbere kugirango bigere ku mashanyarazi menshi. Ugereranije na TSV gakondo (Binyuze kuri Silicon Via) hamwe nubutaka bwimbuto, ikirahuri cya TGV gitanga ibyiza nko gutakaza ibimenyetso bike, gukorera mu mucyo mwinshi, hamwe nubushyuhe bwiza bwumuriro. Iyi mitungo ituma TGV ikwiranye na porogaramu mu itumanaho rya 5G, gupakira optoelectronic, sensor ya MEMS, nibindi byinshi.

No.2 Ibyiringiro by'isoko: Kuki ikirahuri cya TGV cyitabwaho?
Hamwe niterambere ryihuse ryitumanaho ryinshi, guhuza optoelectronic, hamwe nubuhanga buhanitse bwo gupakira, icyifuzo cyikirahure cya TGV kigenda cyiyongera:

Itumanaho rya 5G na Millimeter-Umuhengeri: Ibiranga igihombo gito kiranga ikirahuri cya TGV bituma biba byiza kubikoresho bya RF byihuta cyane nka antene na filteri.

Gupakira Optoelectronic: Ubucucike bukabije bwikirahure nibyiza mubisabwa nka silicon Photonics na LiDAR.

MEMS Sensor Gupakira: Ikirahuri cya TGV gifasha imiyoboro ihanitse cyane, byongera miniaturisiyoneri n'imikorere ya sensor.

Gupakira neza Semiconductor Packaging: Hamwe no kuzamuka kwa tekinoroji ya Chiplet, insimburangingo ya TGV ifite ubushobozi bukomeye mubipfunyika cyane.

No.3 TGV Ikirahuri cya PVD Igikoresho kirambuye
Metallisation ya TGV Glass PVD Coating ikubiyemo gushyira ibikoresho byayobora kurukuta rwimbere rwa vias kugirango bigere kumashanyarazi. Inzira zisanzwe zirimo:

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2. Kuvura Ubuso: Plasma cyangwa imiti ikoreshwa kugirango hongerwe hamwe hagati yikirahure nicyuma.

3. Kubika imbuto zimbuto: PVD (Deposition Vapor Deposition) cyangwa CVD (Chemical Vapor Deposition) ikoreshwa mugushira imbuto yicyuma (urugero, umuringa, titanium / umuringa, palladium) kumirahuri unyuze kurukuta.

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5. Nyuma yo kuvurwa: Icyuma kirenzeho kivanyweho, kandi passivation yo hejuru irakorwa kugirango tunoze kwizerwa.

No.4 Ibibazo bitunganijwe: Inzitizi za TGV Ikirahure Cyimashini Cyimashini

Nubwo ifite ibyiringiro byinshi, TGV Glass Deep Hole Coating Machine ihura nibibazo byinshi bya tekiniki:

1.Uburinganire bwa TGV Ikirahure Cyimbitse Cyuzuye: Ikirahure Cyimbitse gifite igipimo kinini (5: 1 kugeza 10: 1) akenshi kibabazwa no kwegeranya ibyuma kumuryango winjira kandi byuzuye bidahagije hepfo.

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5. Umusaruro rusange no kugenzura ibiciro: Kunoza imikorere ya metallisation no kugabanya ibiciro nibyingenzi mubucuruzi bwikoranabuhanga rya TGV.

No.5 Zhenhua Vacuum ya TGV Ikirahure cya PVD Igikoresho cyo gukemura - Gutambika kuri Horizontal Kumurongo

Ibyiza by'ibikoresho:
1. Ikirahuri cyihariye kinyuze muri tekinoroji ya tekinoroji
Ikirahuri cyihariye cya Zhenhua Vacuum Binyuze muri Hole Metallisation Coating tekinoroji irashobora gukoresha Ikirahure Binyuze muri Hole hamwe n’ibipimo bigera kuri 10: 1, ndetse no kuri aperture ntoya nka micron 30.

2. Guhindura kubunini butandukanye
Shyigikira ibirahuri byubunini butandukanye, harimo 600 × 600mm, 510 × 515mm, cyangwa binini.

3. Guhindura inzira
Bihujwe nibikoresho byoroheje cyangwa bikora ibikoresho bya firime nka Cu, Ti, W, Ni, na Pt, byujuje ibisabwa bitandukanye kugirango bishoboke kandi birwanya ruswa.

4. Imikorere ihamye no Kubungabunga byoroshye
Bifite ibikoresho byubwenge bwo kugenzura ibintu byikora no kugenzura igihe nyacyo cyo kugenzura uburebure bwa firime. Igishushanyo mbonera cyerekana kubungabunga byoroshye no kugabanya igihe.

Igipimo cyo gusaba: Bikwiranye na TGV / TSV / TMV bipfunyitse bigezweho, birashobora kugera kubutaka bwimbuto zifatanije nuburinganire bwimbitse ≥ 10: 1.

–Iyi ngingo yasohowe naIkirahuri cya TGV Binyuze mu mashini ikora imashiniZhenhua Vacuum