Bayani kan Fasaha ta Shafa Gilashin TGV Mai Lamba 1
Shafi na Gilashin TGV Ta Hanyar Rami wata sabuwar fasahar marufi ta microelectronic wadda ta ƙunshi ƙirƙirar ramuka ta cikin gilashin substrates da kuma ƙara ƙarfe a bangon ciki don cimma haɗin lantarki mai yawan gaske. Idan aka kwatanta da TSV na gargajiya (Ta hanyar Silicon Via) da substrates na halitta, gilashin TGV yana ba da fa'idodi kamar ƙarancin asarar sigina, babban bayyananne, da kuma kyakkyawan kwanciyar hankali na zafi. Waɗannan kaddarorin sun sa TGV ya dace da aikace-aikace a cikin sadarwa ta 5G, marufi na optoelectronic, na'urori masu auna MEMS, da ƙari.
Na 2. Hasashen Kasuwa: Me yasa Gilashin TGV ke samun kulawa?
Tare da saurin haɓaka sadarwa mai yawan mita, haɗin kai na optoelectronic, da fasahar marufi ta zamani, buƙatar gilashin TGV yana ƙaruwa koyaushe:
Sadarwa ta 5G da Millimeter-Wave: Halayen ƙarancin asara na gilashin TGV sun sa ya dace da na'urorin RF masu yawan mita kamar eriya da matattara.
Marufi na Optoelectronic: Babban bayyananniya na gilashi yana da amfani ga aikace-aikace kamar silicon photonics da LiDAR.
Marufi na Sensor na MEMS: Gilashin TGV yana ba da damar haɗin kai mai yawa, yana haɓaka rage aiki da aikin na'urori masu auna firikwensin.
Marufi Mai Ingantaccen Semiconductor: Tare da haɓakar fasahar Chiplet, abubuwan da aka yi amfani da su a gilashin TGV suna da babban tasiri a cikin marufi mai yawa.
Tsarin Cikakke na Gilashin PVD na No.3 TGV
Ƙarfafa murfin gilashin TGV PVD ya ƙunshi sanya kayan sarrafawa a bangon ciki na hanyoyin don cimma haɗin lantarki. Tsarin aikin da aka saba amfani da shi ya haɗa da:
1. Tsarin Gilashin TGV Ta Rami: Ana amfani da haƙa laser (laser UV/CO₂), etching mai jika, ko etching busasshe don ƙirƙirar TGV vias, sannan a tsaftace.
2. Maganin Fuskar Sama: Ana amfani da maganin plasma ko sinadarai don ƙara mannewa tsakanin gilashin da layin ƙarfe.
3. Rage Tsarin Iri: Ana amfani da PVD (Rage Tsarin Tururi na Jiki) ko CVD (Rage Tsarin Tururi na Sinadarai) don saka layin iri na ƙarfe (misali, jan ƙarfe, titanium/jan ƙarfe, palladium) a kan gilashin ta bangon ramuka.
4. Zane-zanen Electroplating: Ana sanya jan ƙarfe mai aiki a kan layin iri ta hanyar zane-zanen Electroplating don cimma haɗin kai mai ƙarancin juriya.
5. Bayan magani: Ana cire ƙarfe mai yawa, kuma ana yin aikin cire ƙarfe daga saman don inganta aminci.
Kalubalen Tsarin No.4: Kalubalen Injin Rufe Gilashin TGV Mai Zurfi
Duk da kyawawan abubuwan da take da su, Injin Shafa Gilashin TGV mai zurfin rami yana fuskantar ƙalubale da dama na fasaha:
1. Daidaiton Rufin Gilashin TGV Mai Zurfi: Ramin Gilashin Mai Zurfi Mai Girman ...
2. Rage Tsarin Iri: Gilashi wani abu ne mai hana ruwa shiga, wanda hakan ke sa ya zama da wahala a saka wani nau'in iri mai inganci a bangon da ke amfani da shi.
3. Kula da Damuwa: Bambanci a cikin ma'aunin faɗaɗa zafi na ƙarfe da gilashi na iya haifar da karkacewa ko tsagewa.
4. Mannewa na Layers na Rufe Gilashi Mai Zurfi: Santsi na saman gilashi yana haifar da rauni na manne ƙarfe, wanda ke buƙatar ingantattun hanyoyin magance saman.
5. Samar da kayayyaki da kuma Kula da Farashi: Inganta ingancin amfani da ƙarfe da rage farashi suna da matuƙar muhimmanci ga tallata fasahar TGV.
Maganin Kayan Aikin Shafa Gilashin TGV na Zhenhua Vacuum na No.5 – Shafa Gilashin A Layi Mai Rufi Na Kwance
Amfanin Kayan Aiki:
1. Fasaha ta musamman ta shafa gilashin ta hanyar rami
Fasahar Gilashin Gilashi Mai Rage Rage Na Zhenhua Vacuum ta mallaka za ta iya sarrafa Gilashin Mai Rage Rage Rage na har zuwa 10:1, har ma da ƙananan ramuka masu girman microns 30.
2. Ana iya keɓancewa don Girma daban-daban
Yana tallafawa gilashin da aka yi da girma dabam-dabam, gami da 600×600mm, 510×515mm, ko mafi girma.
3. Sauƙin Tsarin Aiki
Dace da kayan aikin fim mai sarrafa kansa ko na aiki kamar Cu, Ti, W, Ni, da Pt, wanda ke biyan buƙatun aikace-aikace daban-daban don juriya ga tsatsa da kuma gurɓatawa.
4. Ingantaccen Aiki da Sauƙin Gyara
An sanye shi da tsarin sarrafawa mai wayo don daidaita sigogi ta atomatik da kuma sa ido kan daidaiton kauri na fim a ainihin lokaci. Tsarin zamani yana tabbatar da sauƙin kulawa da rage lokacin aiki.
Tsarin Aikace-aikacen: Ya dace da marufi na ci gaba na TGV/TSV/TMV, yana iya cimma rufin Layer na iri ta hanyar rami tare da rabon zurfin rami ≥ 10: 1.
– An fitar da wannan labarin ne dagaMai ƙera Injin Shafa Gilashin TGV Ta RamiInjin tsabtace Zhenhua
Lokacin Saƙo: Maris-07-2025