Ion beam yafashaga kubitsa hamwe ningufu nkeya ion isoko

1.Ibiti bifasha kubitsa cyane cyane ikoresha ingufu nkeya ion kugirango ifashe muguhindura ibikoresho.

(1) Ibiranga ion yafashijwe kubitsa

Mugihe cyo gutwikira, uduce duto twa firime twabitswe dukomeza guterwa ibisasu na ion zashizwe kumasoko ya ion hejuru yubutaka bwa substrate mugihe zometseho ibiti bya ion byashizwemo.

(2) Uruhare rwa ion rwafashijwe kubitsa

Iion ifite ingufu nyinshi zitera ibisasu bya firime igihe cyose; Mu guhererekanya ingufu, ibice byabitswe byunguka ingufu za kinetic, bityo bikanoza amategeko ya nucleation no gukura; Tanga ingaruka zo guhuza ibice bya membrane umwanya uwariwo wose, bigatuma firime ikura cyane; Niba ion ion zatewe inshinge, urwego rwa stoichiometric compound rushobora gushingwa hejuru yibikoresho, kandi ntaho bihurira hagati yikomatanyirizo hamwe na substrate.

2. Inkomoko ya Ion ya ion beam ifasha kubitsa

Ikiranga ion beam ifashwa kubitsa ni uko atome ya firime atom (uduce duto duto) idahwema guterwa ibisasu na ion nkeya ziva mumasoko ya ion hejuru yubutaka bwa substrate, bigatuma imiterere ya firime iba cyane kandi igateza imbere imikorere ya firime. Ingufu E za ion beam ni ≤ 500eV. Inkomoko ya ion ikunze gukoreshwa harimo: Inkomoko ya Kauffman, Inkomoko ya Hall, inkomoko ya anode, inkomoko ya cathode ya Hall ion, isoko ya radiyo yumurongo wa ion, nibindi.