Ion mtengo wothandizira kuyika ndi gwero lamphamvu la ion

1.Ion chitsulo chothandizira kuyika makamaka chimagwiritsa ntchito matabwa otsika a ion kuti athandizire kusintha kwa zinthu.

(1) Makhalidwe a ion yothandizira kuyika

Panthawi yokutira, tinthu tating'onoting'ono ta filimu timawunikiridwa mosalekeza ndi ma ion opangidwa kuchokera ku gwero la ion pamwamba pa gawo lapansi pomwe akukutidwa ndi matabwa a ayoni.

(2) Ntchito ya ion yothandizira kuyika

Ma ion amphamvu amawombera tinthu tating'onoting'ono ta filimu nthawi iliyonse; Mwa kusamutsa mphamvu, ndi waikamo particles kupeza mphamvu kinetic mphamvu, potero kusintha lamulo la nucleation ndi kukula; Kupanga compaction kwambiri pa nembanemba minofu nthawi iliyonse, kupanga filimu kukula kwambiri wandiweyani; Ngati ma ion a gasi opangidwa ndi jekeseni, stoichiometric pawiri wosanjikiza akhoza kupangidwa pamwamba pa zinthu, ndipo palibe mawonekedwe pakati pa pawiri wosanjikiza ndi gawo lapansi.

2. gwero la ion mtengo wothandizidwa ndi ion

Maonekedwe a ion mtengo wothandizira kuyika ndikuti ma atomu osanjikiza filimu (tinthu tating'onoting'ono) amawunikidwa mosalekeza ndi ma ion amphamvu otsika kuchokera kugwero la ion pamtunda wa gawo lapansi, zomwe zimapangitsa kuti filimuyo ikhale wandiweyani ndikuwongolera magwiridwe antchito a filimuyo. Mphamvu E ya mtengo wa ion ndi ≤ 500eV. Zomwe zimagwiritsidwa ntchito kwambiri ndi: Kauffman ion source, Hall ion source, anode layer ion source, hollow cathode Hall ion source, radio frequency ion source, etc.