Makhalidwe a pawiri woonda mafilimu okonzedwa ndi zotakataka magnetron sputtering

Reactive magnetron sputtering zikutanthauza kuti zotakasika mpweya amaperekedwa kuchita ndi sputtered particles m'kati sputtering kupanga pawiri filimu. Iwo akhoza kupereka zotakasika mpweya kuchita ndi sputtering pawiri chandamale pa nthawi yomweyo, komanso kupereka mpweya zotakasika kuchita ndi sputtering zitsulo kapena aloyi chandamale pa nthawi yomweyo kukonzekera pawiri filimu ndi anapatsidwa mankhwala ratio.The makhalidwe zotakasika magnetron sputtering kukonzekera pawiri mafilimu ndi:

(1) The chandamale zipangizo ntchito zotakasika magnetron sputtering (chinthu chandamale chandamale kapena Mipikisano chinthu chandamale) ndi mpweya reaction n'zosavuta kupeza mkulu chiyero, amene amathandiza kukonzekera mkulu-chiyero pawiri mafilimu.

(2) Mu zotakasuka magnetron sputtering, ndi kusintha magawo ndondomeko magawo, mankhwala chiŵerengero kapena sanali mankhwala chiŵerengero cha mafilimu pawiri akhoza kukonzekera, kuti akwaniritse cholinga cha malamulo makhalidwe filimu kusintha zikuchokera filimuyo.

(3) Kutentha kwa gawo lapansi nthawi zambiri sikukhala kokwera kwambiri panthawi yokhazikika ya magnetron sputtering deposition, ndipo kupanga filimuyo nthawi zambiri sikufuna kuti gawo lapansi litenthetse kutentha kwambiri, kotero pali zoletsa zochepa pa gawo lapansi.

(4) Reactive magnetron sputtering ndi oyenera kukonzekera lalikulu m'dera homogeneous mafilimu woonda, ndipo akhoza kukwaniritsa kupanga mafakitale ndi linanena bungwe pachaka wa miliyoni lalikulu mamita ❖ kuyanika pa makina amodzi. Nthawi zambiri, chikhalidwe cha filimuyo chingasinthidwe mwa kungosintha chiŵerengero cha mpweya wokhazikika kukhala mpweya woipa panthawi ya sputtering. Mwachitsanzo, filimuyo ikhoza kusinthidwa kuchokera kuzitsulo kupita ku semiconductor kapena osati zitsulo.

——Nkhaniyi yaterowopanga makina opangira vacuumGuangdong Zhenhua anamasulidwa