Ion beam nyere aka ntinye na isi iyi ion dị ala

1.Ion beam nyeere ntinye aka tumadi na-eji obere ume ion doo aka na elu mgbanwe nke ihe.

(1) Àmà nke ion na-enyere ntinye aka

N'oge usoro mkpuchi ahụ, a na-agbanye ihe nkiri ndị a na-echekwa na-aga n'ihu site na ion ebubo sitere na isi iyi nke ion n'elu ihe nkedo ahụ mgbe a na-ekpuchi ya na ion ion.

(2) Ọrụ nke ion nyere ntinye ego

Iyọn ike dị elu na-atụba ụmụ irighiri ihe nkiri na-enweghị atụ n'oge ọ bụla; Site na ịnyefe ike, ihe ndị ahụ echekwara na-enweta ike nke kinetic ka ukwuu, si otú ahụ na-emeziwanye iwu nke nucleation na uto; Mepụta mmetụta mkpirisi na anụ ahụ akpụkpọ ahụ n'oge ọ bụla, na-eme ka ihe nkiri ahụ na-eto eto karịa; Ọ bụrụ na a na-agbanye ion gas na-emeghachi omume, enwere ike ịmepụta oyi akwa stoichiometric n'elu ihe ahụ, ọ dịghịkwa interface dị n'etiti oyi akwa na mkpụrụ.

2. Ion isi iyi maka ion beam nyere ntinye ego

Ihe e ji mara nke ion doo aka deposition bụ na film oyi akwa atọm (deposition ahụ) na-na-na-aga n'ihu bombarded site ala ike ion si ion isi iyi n'elu nke mkpụrụ, na-eme ka film Ọdịdị nke ukwuu ok na-eme ka arụmọrụ nke ihe nkiri oyi akwa. Ike E nke ion beam bụ ≤ 500eV. Isi mmalite ion ndị a na-ejikarị gụnyere: Isi iyi Kauffman ion, isi iyi ion Hall, isi iyi ion nke anode, oghere cathode Hall ion isi iyi, isi iyi redio ugboro ugboro, wdg.