1.Ion beam assisted deposition mas siv tsawg zog ion beams los pab nyob rau hauv qhov chaw hloov kho cov ntaub ntawv.
(1) Cov yam ntxwv ntawm ion assisted deposition
Thaum lub sij hawm txheej txheej txheej, cov zaj duab xis deposited yog tsis tu ncua bombarded los ntawm them ions los ntawm ion qhov chaw nyob rau saum npoo ntawm lub substrate thaum coated nrog them ion beams.
(2) Lub luag haujlwm ntawm ion assisted deposition
Lub zog siab ions foob pob tawg ntawm cov yeeb yaj kiab uas tau ploj mus txhua lub sijhawm; Los ntawm kev hloov lub zog, cov khoom tso tawm tau txais lub zog kinetic ntau dua, yog li txhim kho txoj cai ntawm nucleation thiab kev loj hlob; Ua kom cov nyhuv compaction ntawm daim nyias nyias ntawm txhua lub sijhawm, ua rau cov yeeb yaj kiab loj hlob ntau dua; Yog hais tias cov roj reactive ions raug txhaj, ib txheej stoichiometric compound tuaj yeem tsim rau ntawm qhov chaw ntawm cov khoom, thiab tsis muaj qhov cuam tshuam ntawm cov txheej txheej thiab cov substrate.
2. Ion qhov chaw rau ion beam pab deposition
Tus yam ntxwv ntawm ion beam pab deposition yog hais tias cov zaj duab xis txheej atoms (deposition hais) yog tsis tu ncua bombarded los ntawm tsawg zog ions los ntawm ion qhov chaw nyob rau saum npoo ntawm lub substrate, ua rau cov zaj duab xis qauv heev ntom thiab txhim kho kev ua tau zoo ntawm cov zaj duab xis txheej. Lub zog E ntawm ion beam yog ≤ 500eV. Cov khoom siv ion feem ntau suav nrog: Kauffman ion qhov chaw, Hall ion qhov chaw, anode txheej ion qhov chaw, hollow cathode Hall ion qhov chaw, xov tooj cua zaus ion qhov chaw, thiab lwm yam.
Post lub sij hawm: Jun-30-2023