Reactive magnetron sputtering txhais tau hais tias cov pa roj reactive yog muab los ua cov khoom siv hluav taws xob hauv cov txheej txheem ntawm sputtering los tsim cov yeeb yaj kiab sib xyaw. Nws tuaj yeem muab cov roj reactive los ua rau lub hom phiaj ntawm sputtering compound lub hom phiaj tib lub sijhawm, thiab tseem tuaj yeem muab cov roj reactive los ua rau cov hlau sputtering los yog alloy lub hom phiaj tib lub sijhawm los npaj cov yeeb yaj kiab sib xyaw nrog cov tshuaj sib piv.Cov yam ntxwv ntawm reactive magnetron sputtering los npaj cov yeeb yaj kiab yog:
(1) Lub hom phiaj cov ntaub ntawv siv rau reactive magnetron sputtering (ib lub hom phiaj los yog ntau lub hom phiaj) thiab cov tshuaj tiv thaiv gases yog ib qho yooj yim kom tau txais cov purity siab, uas yog tsim nyog rau kev npaj ntawm high-purity compound films.
(2) Nyob rau hauv reactive magnetron sputtering, los ntawm kev kho cov txheej txheem deposition tsis, tshuaj ratio los yog non-chemical ratio ntawm compound films yuav tsum tau npaj, thiaj li mus cuag lub hom phiaj ntawm kev tswj cov yeeb yam yam ntxwv los ntawm kev kho cov muaj pes tsawg leeg ntawm cov zaj duab xis.
(3) Qhov kub ntawm lub substrate feem ntau tsis siab dhau thaum lub sij hawm reactive magnetron sputtering deposition txheej txheem, thiab cov txheej txheem ua zaj duab xis feem ntau tsis xav kom lub substrate yuav tsum tau rhuab mus rau high kub, yog li muaj kev txwv tsawg ntawm cov khoom siv substrate.
(4) Reactive magnetron sputtering yog tsim rau kev npaj ntawm thaj tsam loj ntawm homogeneous nyias zaj duab xis, thiab tuaj yeem ua tiav cov khoom lag luam nrog kev tsim tawm txhua xyoo ntawm ib lab square metres ntawm txheej los ntawm ib lub tshuab. Feem ntau, qhov xwm txheej ntawm zaj duab xis tuaj yeem hloov pauv los ntawm kev hloov pauv ntawm cov pa roj reactive rau inert gas thaum lub sij hawm sputtering. Piv txwv li, cov yeeb yaj kiab tuaj yeem hloov pauv los ntawm hlau mus rau semiconductor lossis tsis yog hlau.
—— Cov kab lus no muajtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua tso tawm
Post lub sij hawm: Aug-31-2023