Xa sithetha ngokubanzi, i-CVD inokwahlulwa ngokurhabaxa ibe ziindidi ezimbini: enye ikwimveliso enye kwi-substrate vapour deposition of single-crystal epitaxial layer, eyi-CVD emxinwa; enye kukubekwa kweefilimu ezibhityileyo kwi-substrate, kubandakanywa neefilimu ezininzi zemveliso kunye ne-amorphous. Ngokutsho kweentlobo ezahlukeneyo zeegesi zomthombo ezisetyenzisiweyo, i-CVD inokwahlulwa ibe yindlela yokuthutha i-halogen kunye ne-metal-organic chemical vapor deposition (MOCVD), eyangaphambili kwi-halide njengomthombo wegesi, le yokugqibela kwiikhompawundi zetsimbi-organic njengomthombo wegesi. Ngokoxinzelelo kwi-reaction chamber, inokwahlulwa ibe ziindidi ezintathu eziphambili: uxinzelelo lwe-atmospheric CVD (APCVD), uxinzelelo oluphantsi lwe-CVD (LPCVD) kunye ne-ultra-high vacuum CVD (UHV/CVD) .CVD ingasetyenziswa njengendlela yokuncedisa yokwandisa amandla, kwaye namhlanje eziqhelekileyo ziquka i-plasmcedCVDCVDhanced plasma kunye ne-PEDCVDhanced (PCVD), njl. njl. I-CVD yindlela yokubekwa kwesigaba segesi.
I-CVD yindlela yokwenza ifilimu apho i-gas-phase substance isabela ngekhemikhali kwiqondo lokushisa eliphezulu ukuvelisa into eqinileyo efakwe kwi-substrate. Ngokukodwa, i-halides yensimbi eguquguqukayo okanye i-metal organic compounds ixutywe kunye ne-carrier gas efana ne-H, Ar, okanye i-N, kwaye emva koko ihanjiswe ngokufanayo kwi-substrate ephezulu yokushisa kwigumbi lokuphendula ukwenza ifilimu encinci kwi-substrate ngokusebenzisa i-chemical reaction. Kungakhathaliseki ukuba luhlobo luni lwe-CVD, i-deposition ingenziwa ngempumelelo kufuneka ihlangabezane nale miqathango ilandelayo: Okokuqala, kwiqondo lokushisa lokubeka, ii-reactants kufuneka zibe noxinzelelo olwaneleyo lomphunga; Okwesibini, imveliso yokusabela, ukongeza kwidiphozithi efunwayo yesimo esiqinileyo, ukuphumla kwegesi yegesi; Okwesithathu, idiphozithi ngokwayo kufuneka iphantsi ngokwaneleyo uxinzelelo lomphunga ukuqinisekisa ukuba inkqubo yokusabela kwi-deposition inokugcinwa kuyo yonke inkqubo ye-substrate eshushu; Okwesine, i-substrate material ihanjiswa ngokufanayo kwigumbi lokuphendula kwi-substrate, ngokuphendula kweekhemikhali ukwenza ifilimu encinci. Okwesine, uxinzelelo lomphunga we-substrate impahla ngokwayo kufuneka ibe phantsi ngokwaneleyo kwiqondo lokushisa lokubeka.
–Eli nqaku likhutshiwe byumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: May-04-2024