Muri rusange, CVD ishobora kugabanywamo ubwoko bubiri: bumwe buri mu gicuruzwa kimwe kiri ku gice cy’umwuka gishyirwamo umwuka wa epitaxial imwe, ari yo CVD ntoya; ubundi ni ugushyiramo filime nto ku gice cy’umwuka, harimo filime nyinshi n’izidafite aho zihuriye. Dukurikije ubwoko butandukanye bw’imyuka ikoreshwa, CVD ishobora kugabanywamo uburyo bwo gutwara halogen na MOCVD, ubwa mbere bugashyirwamo umwuka wa gazi mu byuma (metal-organic chemical vapor deposition), ubwa kabiri bugashyirwamo umwuka wa gazi mu byuma (metal-organic vapor deposition). Dukurikije igitutu kiri mu cyumba cy’imyitozo, ishobora kugabanywamo ubwoko butatu bw’ingenzi: CVD (atmospheric pressure CVD) (APCVD), CVD (low pressure CVD) na CVD (ultra-high vacuum CVD). CVD ishobora kandi gukoreshwa nk'uburyo bw’inyongera butanga ingufu, kandi muri iki gihe uburyo busanzwe burimo CVD (PECVD) na CVD (light-enhanced CVD) (PCVD), nibindi. CVD ni uburyo bwo gushyiramo umwuka mu buryo bwa gaze.
CVD ni uburyo bwo gukora filime aho ikintu gikoreshwa mu buryo bwa gazi gikoreshwa mu buryo bwa shimi ku bushyuhe bwinshi kugira ngo habeho ikintu gikomeye gishyirwa ku kintu cy’ingenzi. By’umwihariko, halide z’icyuma zihinduka cyangwa ibinyabutabire by’icyuma bivangwa na gaze itwara ibintu nka H, Ar, cyangwa N, hanyuma bigatwarwa kimwe mu buryo bwa shimi mu cyumba cy’ubushyuhe bwinshi mu cyumba cy’ubushyuhe kugira ngo habeho agace gato kuri substrate binyuze mu buryo bwa shimi. Ubwoko bwa CVD ubwo aribwo bwose, ubwiyongere bushobora gukorwa neza bugomba kuba bwujuje ibi bikurikira: Ubwa mbere, mu bushyuhe bwo gushyiramo ibintu, ibinyabutabire bigomba kugira umuvuduko uhagije w’umwuka; Icya kabiri, umusaruro w’ubwiyongere, uretse ubwiyongere bwifuzwa ku kintu gikomeye, ibindi byose bigize imiterere y’umwuka; Icya gatatu, ubwiyongere ubwabwo bugomba kuba bufite umuvuduko muto uhagije w’umwuka kugira ngo inzira yo gushyiramo ibintu ishobora kuguma mu nzira yose y’ikintu gishyushye; Icya kane, ibikoresho bya substrate bijyanwa kimwe mu cyumba cy’ubwiyongere kuri substrate, binyuze mu buryo bwa shimi kugira ngo habeho agace gato. Icya kane, umuvuduko w’umwuka w’ibikoresho bya substrate ubwabyo ugomba kuba uri hasi bihagije ku bushyuhe bwo gushyiramo ibintu.
–Iyi nkuru yasohotse byuruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Gicurasi-04-2024