Nau'ikan Fasahar CVD

A takaice dai, ana iya raba CVD zuwa nau'i biyu: ɗaya yana cikin samfurin guda ɗaya akan ajiyar tururin substrate na Layer ɗin epitaxial guda ɗaya, wanda yake da ɗan ƙaramin CVD; ɗayan kuma shine ajiyar siririn fina-finai akan substrate, gami da fina-finai masu yawa da marasa tsari. Dangane da nau'ikan iskar gas daban-daban da ake amfani da su, ana iya raba CVD zuwa hanyar sufuri ta halogen da kuma ajiyar tururin sinadarai na ƙarfe-organic (MOCVD), na farko zuwa halide azaman tushen iskar gas, na biyu kuma zuwa mahaɗan ƙarfe-organic azaman tushen iskar gas. Dangane da matsin lamba a cikin ɗakin amsawa, ana iya raba shi zuwa manyan nau'i uku: matsin lamba na yanayi CVD (APCVD), ƙarancin matsin lamba CVD (LPCVD) da ƙarancin iskar oxygen (UHV/CVD). Hakanan ana iya amfani da CVD azaman hanyar taimako mai haɓaka makamashi, kuma a zamanin yau waɗanda aka fi sani sun haɗa da CVD mai haɓaka plasma (PECVD) da CVD mai haɓaka haske (PCVD), da sauransu. CVD ainihin hanyar ajiyar iskar gas ce.

CVD a zahiri hanya ce ta samar da fim inda ake yin wani abu mai siffar iskar gas a yanayin zafi mai yawa don samar da wani abu mai tauri wanda aka ajiye a kan wani abu mai siffar ƙasa. Musamman ma, ana haɗa halides na ƙarfe mai canzawa ko mahaɗan ƙarfe na halitta da iskar gas mai ɗaukar kaya kamar H, Ar, ko N, sannan a haɗa su daidai gwargwado zuwa wani abu mai girman zafin jiki a cikin ɗakin amsawa don samar da wani fim mai siriri akan abu ta hanyar haɗakar sinadarai. Ko wane nau'in CVD ne, za a iya aiwatar da shigarwa cikin nasara dole ne ya cika waɗannan sharuɗɗan asali: Na farko, a cikin zafin ajiya, masu amsawa dole ne su sami matsin lamba mai yawa; Na biyu, samfurin amsawa, ban da wurin ajiya da ake so don yanayin tauri, sauran yanayin gas; Na uku, ajiyar kanta ya kamata ya zama ƙasa da matsin lamba na tururi don tabbatar da cewa ana iya kiyaye tsarin amsawar shigarwa a cikin dukkan tsarin substrate mai zafi; Na huɗu, ana jigilar kayan substrate daidai gwargwado zuwa ɗakin amsawa akan abu, ta hanyar amsawar sinadarai don samar da fim mai siriri. Na huɗu, matsin lamba na kayan substrate da kanta ya kamata ya zama ƙasa da zafin ajiya.

– An fitar da wannan labarin byinjin shafa injin injinGuangdong Zhenhua