I te nuinga o te wā, ka taea te wehewehe i te CVD ki ngā momo e rua: ko te tuatahi he hua kotahi i runga i te paparanga epitaxial kotahi-kiriata i runga i te papa, he CVD whāiti; ko tetahi ko te whakatakotoranga o ngā kiriata angiangi ki runga i te papa, tae atu ki ngā kiriata maha-hua me ngā kiriata kore-āhua. E ai ki ngā momo hau pūtake rerekē e whakamahia ana, ka taea te wehewehe i te CVD ki te tikanga kawe halogen me te whakatakotoranga kohu matū whakarewa-organika (MOCVD), ko te tuatahi ki te halide hei puna hau, ko te tuarua ki ngā matū whakarewa-organika hei puna hau. E ai ki te pēhanga i roto i te rūma tauhohenga, ka taea te wehewehe ki ngā momo matua e toru: CVD pēhanga hau (APCVD), CVD pēhanga iti (LPCVD) me te CVD korehau tino teitei (UHV/CVD). Ka taea hoki te whakamahi i te CVD hei tikanga āwhina whakarei ake i te pūngao, ā, i ēnei rā ko ngā mea noa ko te CVD whakarei ake i te plasma (PECVD) me te CVD whakarei ake i te mārama (PCVD), me ētahi atu. Ko te CVD he tikanga whakatakotoranga hau-wāhanga.
Ko te CVD he tikanga hanga kiriata e tauhohenga matū ana te matū āhua-hau i te pāmahana teitei hei whakaputa i te matū totoka ka whakatakotoria ki runga i te papa. Ina koa, ka konatunatua ngā halide konganuku pūngāwerewere, ngā matū waro konganuku rānei ki te hau kawe pērā i te H, Ar, N rānei, kātahi ka haria ōrite ki te papa pāmahana-teitei i roto i te rūma tauhohenga hei hanga i te kiriata angiangi ki runga i te papa mā te tauhohenga matū. Ahakoa te momo CVD, me tutuki i te mahi angitu te whakatakoto i ngā tikanga taketake e whai ake nei: Tuatahi, i roto i te pāmahana whakatakoto, me nui te pēhanga kohu o ngā tauhohenga; Tuarua, ko te hua tauhohenga, hei tāpiri atu ki te whakatakoto e hiahiatia ana mō te āhua totoka, ko te toenga o te āhua hau; Tuatoru, me iti te pēhanga kohu o te whakatakoto kia mau tonu te tukanga tauhohenga whakatakoto i roto i te tukanga katoa o te papa wera; Tuawhā, ka haria ōrite te rauemi papa ki te rūma tauhohenga i runga i te papa, mā te tauhohenga matū hei hanga i te kiriata angiangi. Tuawhā, me iti hoki te pēhanga kohu o te rauemi papa i te pāmahana whakatakoto.
–Kua tukuna tēnei tuhinga bykaihanga mīhini paninga korehauGuangdong Zhenhua
Wā tuku: Mei-04-2024