Ma ke ʻano laulā, hiki ke hoʻokaʻawale ʻia ʻo CVD i ʻelua ʻano: ʻo kekahi ma ka huahana hoʻokahi ma ka substrate vapor deposition o ka papa epitaxial kristal hoʻokahi, ʻo ia hoʻi ʻo CVD; ʻo kekahi ka waiho ʻana o nā kiʻiʻoniʻoni lahilahi ma ka substrate, me nā huahana he nui a me nā kiʻiʻoniʻoni amorphous. Wahi a nā ʻano like ʻole o nā kinoea kumu i hoʻohana ʻia, hiki ke hoʻokaʻawale ʻia ʻo CVD i ke ʻano lawe halogen a me ka metal-organic chemical vapor deposition (MOCVD), ʻo ka mea mua i halide ma ke ʻano he kumu kinoea, ʻo ka mea hope i nā hui metala-organic ma ke ʻano he kumu kinoea. Wahi a ke kaomi i loko o ke keʻena hopena, hiki ke hoʻokaʻawale ʻia i ʻekolu ʻano nui: ka atmospheric pressure CVD (APCVD), ka low pressure CVD (LPCVD) a me ka ultra-high vacuum CVD (UHV/CVD). Hiki ke hoʻohana ʻia ʻo CVD ma ke ʻano he ʻano kōkua i hoʻonui ʻia i ka ikehu, a i kēia mau lā, ʻo nā mea maʻamau e komo pū me ka plasma-enhanced CVD (PECVD) a me ka light-enhanced CVD (PCVD), a pēlā aku. ʻO CVD ke ʻano he ʻano waiho kinoea.
ʻO CVD ke ʻano he ʻano hana kiʻiʻoniʻoni kahi e hoʻopili ʻia ai kahi mea kinoea i ka mahana kiʻekiʻe e hana i kahi mea paʻa i waiho ʻia ma luna o kahi substrate. ʻO ke kikoʻī, ua hui pū ʻia nā halides metala volatile a i ʻole nā mea hui metala organik me kahi kinoea lawe e like me H, Ar, a i ʻole N, a laila lawe like ʻia i kahi substrate wela kiʻekiʻe i loko o kahi keʻena hana e hana i kahi kiʻiʻoniʻoni lahilahi ma ka substrate ma o kahi hopena kemika. ʻAʻohe mea i ke ʻano o CVD, hiki ke hoʻokō pono ʻia ka waiho ʻana e pono e hoʻokō i nā kūlana kumu: ʻO ka mua, i ka mahana waiho ʻana, pono i nā reactants ke loaʻa i kahi kaomi mahu kiʻekiʻe; ʻO ka lua, ʻo ka huahana hana, me ka waiho ʻana i makemake ʻia no ke kūlana paʻa, ke koena o ke kūlana kinoea; ʻO ke kolu, pono ka waiho ʻana iā ia iho i ke kaomi mahu haʻahaʻa e hōʻoia i ka hiki ke mālama ʻia ke kaʻina hana waiho ʻana i ke kaʻina holoʻokoʻa o ka substrate wela; ʻO ka hā, ua lawe like ʻia ka mea substrate i ke keʻena hana ma ka substrate, ma o ka hopena kemika e hana i kahi kiʻiʻoniʻoni lahilahi. ʻO ka hā, pono hoʻi e haʻahaʻa ke kaomi mahu o ka mea substrate iā ia iho i ka mahana waiho ʻana.
–Ua hoʻokuʻu ʻia kēia ʻatikala bymea hana mīkini uhi hakahakaGuangdong Zhenhua
Ka manawa hoʻouna: Mei-04-2024