Mwachidule, CVD ingagawidwe m'magulu awiri: imodzi ili mu chinthu chimodzi chomwe chili pa substrate vapor deposition ya single-crystal epitaxial layer, yomwe ndi CVD yopapatiza; ina ndi kuika mafilimu owonda pa substrate, kuphatikizapo mafilimu ambiri ndi amorphous. Malinga ndi mitundu yosiyanasiyana ya mpweya womwe umagwiritsidwa ntchito, CVD ingagawidwe m'njira yoyendera halogen ndi metal-organic chemical vapor deposition (MOCVD), yoyamba ku halide ngati gwero la mpweya, yachiwiri ku metal-organic compounds ngati gwero la mpweya. Malinga ndi kupanikizika mu chipinda choyankhira, ingagawidwe m'mitundu itatu ikuluikulu: atmospheric pressure CVD (APCVD), low pressure CVD (LPCVD) ndi ultra-high vacuum CVD (UHV/CVD). CVD ingagwiritsidwenso ntchito ngati njira yothandizira yowonjezera mphamvu, ndipo masiku ano yodziwika bwino ikuphatikizapo plasma-enhanced CVD (PECVD) ndi light-enhanced CVD (PCVD), ndi zina zotero. CVD kwenikweni ndi njira yoika gas-phase deposition.
CVD kwenikweni ndi njira yopangira filimu momwe chinthu cha gasi chimagwiritsidwira ntchito ndi mankhwala kutentha kwambiri kuti chipange chinthu cholimba chomwe chimayikidwa pa substrate. Makamaka, halides yachitsulo yosasunthika kapena mankhwala achitsulo opangidwa ndi organic amasakanizidwa ndi mpweya wonyamula monga H, Ar, kapena N, kenako amasamutsidwa mofanana ku substrate yotentha kwambiri mu chipinda chochitira kuti apange filimu yopyapyala pa substrate kudzera mu reaction ya mankhwala. Kaya ndi mtundu wanji wa CVD, kuika kungachitike bwino kuyenera kukwaniritsa zofunikira izi: Choyamba, kutentha koika, ma reactants ayenera kukhala ndi kuthamanga kwa nthunzi kokwanira; Chachiwiri, chinthu chochita, kuwonjezera pa malo ofunikira a mkhalidwe wolimba, gawo lonse la mkhalidwe wa gaseous; Chachitatu, kuika yokha kuyenera kukhala kuthamanga kwa nthunzi kotsika mokwanira kuti zitsimikizire kuti njira yoika ikasungidwe ikhoza kusungidwa mu njira yonse ya substrate yotentha; Chachinayi, zinthu za substrate zimanyamulidwa mofanana kupita ku chipinda chochitira pa substrate, kudzera mu reaction ya mankhwala kuti apange filimu yopyapyala. Chachinayi, kuthamanga kwa nthunzi kwa zinthu za substrate yokha kuyeneranso kukhala kotsika mokwanira kutentha koika.
– Nkhaniyi yatulutsidwa bywopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Meyi-04-2024